Method and system of detecting tilt angle of object surface and method and system of compensating the same

A system of detecting a tilt angle of an object surface, comprising:

• a light source device, projecting a plurality of light beams to an object surface, wherein a number of the light beams is greater than or equal to 3;
• an image capture device, capturing an image of the object surface;
• an axial direction controller, coupled to the light source device and adjusting angles of the light beams of the light source device projecting to the object surface;
• an object carrying device, adjusting a vertical distance between the light source device and the object surface;
• and
• a computing device, coupled to the image capture device and receiving the image so as to obtain a plurality of light spots generated on the object surface by the light beams,
• wherein the computing device calculates a correction angle between the light source device and the object surface according to the light spots.

A method of compensating a tilt angle of an object surface, comprising:

• projecting a plurality of light beams by a light source device to an object surface, wherein a number of the light beams is greater than or equal to 3;
• capturing an image of the object surface so as to obtain a plurality of light spots generated on the object surface by the light beams;
• adjusting a vertical distance between the light source device and the object surface to execute a focus program so as to gather the light spots in a focal point on the object surface;
• and
• adjusting and calculating a correction angle and the vertical distance between the light source device and the object surface according to the light spots.

A system of compensating a tilt angle of an object surface, comprising:

• a light source device, projecting a plurality of light beams to an object surface, wherein a number of the light beams is greater than or equal to 3;
• an image capture device, capturing an image of the object surface;
• an axial direction controller, coupled to the light source device and adjusting angles of the light beams of the light source device projecting to the object surface;
• an object carrying device, adjusting a vertical distance between the light source device and the object surface;
• and
• a computing device, coupled to the image capture device and receiving the image so as to obtain a plurality of light spots generated on the object surface by the light beams,
• wherein the computing device executes a focus program according to the light spots, adjusts the vertical distance through the axial direction controller so as to gather the light spots in a focal point on the object surface and calculates and adjusts a correction angle and the vertical distance between the light source device and the object surface according to the light spots.