Aberration correcting method and aberration correcting apparatus
AssigneeCanon Kabushiki Kaisha
InventorsKoji Nozato, Kohei Takeno
Life of this patent
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Abstract
Aberration is measured as phase information at each of a plurality of aberration measurement points, and at the time of correcting the aberration with correction pixels of an aberration correction unit of which the number is greater than the number of the plurality of aberration measurement points, correction pixels corresponding to each aberration measurement point are driven based on the phase information. Regarding correction pixels not positionally corresponding to the aberration measurement points, the aberration correction unit is driven based on phase information in the vicinity of this correction pixel.
Claims11
An aberration correcting method comprising:
- measuring, using an aberration measuring unit, an aberration of reflected light acquired by irradiating measurement light on a subject, the aberration being measured as phase information at each of a plurality of aberration measurement points;
- driving an aberration correction unit to correct pixel values corresponding to each aberration measurement point based on the phase information with correction pixels of which the number is greater than the number of the plurality of aberration measurement points;
- and
- driving, regarding correction pixels not positionally corresponding to each of the aberration measurement points, the aberration correction unit based on the phase information in the vicinity of the correction pixel.
An aberration correcting apparatus configured to image a subject by reflected light acquired by irradiating measurement light on the subject, comprising:
- an aberration measuring unit configured to measure aberration of the reflected light based on a plurality of aberration measurement points;
- an aberration correction unit configured to correct the measured aberration by correction pixels of which the number is greater than the number of the plurality of aberration measurement points;
- and
- a drive amount complementing unit configured to calculate drive amount of the correction pixels at positions not corresponding to the aberration measurement points.
Dependencies are inferred from the claim text.