Substrate processing device

A substrate processing apparatus, comprising:

• a transfer part configured to transfer a substrate;
• a processing part configured to process the substrate;
• a recording part configured to record a transfer operation of the substrate by the transfer part as image data;
• an operation part configured to operate display on a plurality of screens;
• and
• a control part configured to control the transfer part, the processing part, the recording part, and the operation part in association with information indicating a state of the substrate,
• wherein the control part is further configured to:
• comprise a first storage part configured to store, among substrate processing result information including transfer history information of the substrate by the transfer part and production information indicating a substrate processing situation by the processing part, the transfer history information, and a second storage part configured to store the production information among the substrate processing result information,
• if a screen for displaying the transfer history information is selected, display the image data recorded by the recording part together with the transfer history information on the operation part, and
• if a screen for displaying the production information is selected, display the image data recorded by the recording part together with the production information on the operation part.

A substrate processing apparatus, comprising:

• a transfer part configured to transfer a substrate;
• a detection part configured to detect a transfer error occurring when the substrate is transferred by the transfer part;
• a transfer control part configured to control transfer of the substrate by the transfer part;
• a recording part configured to record transfer operation of the substrate by the transfer part as image data;
• and
• a primary control part configured to convert the image data into a file, by dividing the image data recorded by the recording part based on a predetermined time period or a time period between predetermined events, and store the file in a memory part,
• wherein the primary control part is further configured to:
• generate error information including an error notification indicating occurrence of the transfer error, time data indicating a time point when the transfer error occurs, a recipe content upon the occurrence of the transfer error, and monitoring data indicating a state of the substrate processing apparatus upon the occurrence of the transfer error,
• associate the file including the image data upon the occurrence of the transfer error with the error information while associating numerical data including a position and a velocity of the transfer part upon the occurrence of the transfer error with the error information,
• associate comparative data, generated by comparing image data and numerical data in a normal state which are pre-stored in the memory part with the image data and the numerical data upon the occurrence of the transfer error and extracting differences between the data, with the error information, and
• display the error information on an operation screen installed in the primary control part.