Piezoelectric actuator, inkjet print head assembly, and method of manufacturing the piezoelectric actuator and the inkjet print head assembly

An inkjet print head assembly comprising:

• an inkjet print head plate in which an ink channel is formed;
• and
• a piezoelectric actuator formed to correspond to pressure chambers in the inkjet print head plate and providing a driving force for ejecting ink from the pressure chambers to the nozzles,
• wherein the piezoelectric actuator comprises:
• upper and lower electrodes providing driving voltages;
• and
• a piezoelectric film formed between the upper and lower electrodes and providing a driving force to ink in a plurality of pressure chambers formed on an inkjet print head, respectively,
• wherein the piezoelectric film comprises a plurality of basin parts individually formed on respective tops of the plurality of pressure chambers and a large-area part connected to the plurality of basin parts, respectively, at one ends of the plurality of basin parts and formed as a single body, and
• wherein the large-area part comprises an etching groove formed on an extended line of a basin line partitioning the basin parts.

A method of manufacturing an inkjet print head assembly, comprising:

• forming an ink channel comprising a plurality of pressure chambers in an inkjet print head plate;
• sequentially forming a preliminary lower electrode, a preliminary piezoelectric film, and a preliminary upper electrode on a top of the inkjet print head plate;
• forming a first resist corresponding to a shape of a final piezoelectric film comprising a plurality of basin parts formed to correspond to the plurality of pressure chambers and a large-area part connected to the plurality of basin parts, respectively, and formed as a single body, on a top of the preliminary upper electrode;
• etching a part not covered by the first resist to leave a part of the preliminary piezoelectric film and removing the first resist;
• forming a second resist corresponding to a shape of a final upper electrode, on the top of the preliminary upper electrode;
• and
• etching a part not covered by the second resist to a thickness of the preliminary upper electrode and removing the second resist.