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US 2014/0176251 A1Published application
Mems mass bias to track changes in bias conditions and reduce effects of flicker noise
AssigneeSilicon Laboratories Inc.
InventorsManu Seth, Aaron Caffee
Life of this patent
Estimating the term…
Abstract
A technique for tracking changes in bias conditions of a microelectromechanical system (MEMS) device includes applying an electrode bias signal to an electrode of the MEMS device. The technique includes applying a mass bias signal to a mass of the MEMS device suspended from a substrate of the MEMS device. The technique includes generating the mass bias signal based on a target mass-to-electrode bias signal level and a signal level of the electrode bias signal.
Claims21
A method comprising:
- applying an electrode bias signal to an electrode of a microelectromechanical system (MEMS) device;
- applying a mass bias signal to a mass of the MEMS device suspended from a substrate of the MEMS device;
- and
- generating the mass bias signal based on a target mass-to-electrode bias signal level and a signal level of the electrode bias signal.
1 more element
An apparatus comprising:
- a microelectromechanical system (MEMS) device comprising:
- a first electrode configured to receive an electrode bias signal;
- and
- a mass suspended from a substrate, the mass being configured to receive a mass bias signal;
- and
- a mass bias signal generator configured to generate the mass bias signal based on a target mass-to-electrode bias signal and a signal level of the electrode bias signal.
3 more elements
An apparatus comprising:
- a microelectromechanical device including a mass and an electrode;
- means for compensating a mass-to-electrode bias signal for changes in an electrode bias signal.
Dependencies are inferred from the claim text.