Pre space transformer, space transformer manufactured using the pre space transformer, and semiconductor device inspecting apparatus including the space transformer
AssigneeSamsung Electro-Mechanics Co., Ltd.
InventorsYoon Hyuck Choi, Kwang Jae Oh, Ki Young Kim
Life of this patent
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Abstract
Disclosed herein is a pre space transformer including: a substrate having a first surface and a second surface, which is an opposite surface to the first surface; individual electrodes disposed on the first surface; and common electrodes disposed in the substrate, wherein the individual electrodes are repeatedly disposed while configuring a unit pattern.
Claims18
A pre space transformer comprising:
- a substrate having a first surface and a second surface, which is an opposite surface to the first surface;
- individual electrodes disposed on the first surface;
- and
- common electrodes disposed in the substrate,
- wherein the individual electrodes are repeatedly disposed while configuring a unit pattern.
A space transformer compensating for a difference in a circuit pitch between a semiconductor device and a circuit board, the space transformer comprising:
- a substrate having a first surface facing the semiconductor device and a second surface facing the circuit board;
- individual electrodes disposed on the first surface while configuring one unit pattern;
- common electrodes disposed in the substrate;
- an insulating pattern covering the first surface so that the individual electrodes are selectively opened;
- circuit patterns formed to be electrically connected to the individual electrodes on the insulating pattern;
- and
- connection pins connected to the circuit patterns to thereby be connected to the semiconductor device.
A semiconductor device inspecting apparatus for inspecting electrical characteristics of a semiconductor device, the semiconductor device inspecting apparatus comprising:
- a printed circuit board receiving an inspecting signal transferred from a tester;
- an interposer disposed at one side of the printed circuit board facing the semiconductor device;
- and
- a space transformer receiving the inspecting signal transferred from the interposer to transfer the inspecting signal to the semiconductor device and compensating for a difference in a circuit pitch between the printed circuit board and the semiconductor device,
- wherein the space transformer includes:
- a substrate having a first surface facing the semiconductor device and a second surface facing the circuit board;
- individual electrodes disposed on the first surface while configuring one unit pattern;
- common electrodes disposed in the substrate;
- an insulating pattern covering the first surface so that the individual electrodes are selectively opened;
- circuit patterns formed to be electrically connected to the individual electrodes on the insulating pattern;
- and
- connection pins connected to the circuit patterns to thereby be connected to the semiconductor device.
Dependencies are inferred from the claim text.