Probe card for power device

A probe card that inspects a dynamic characteristic of a plurality of power devices formed on a semiconductor wafer, the probe card comprising:

• a first probe configured to come into electric contact with an emitter electrode of the power device;
• a second probe configured to come into electric contact with a gate electrode of the power device;
• a circuit board having a wiring pattern to which each of the first probe and the second probe is connected;
• a contact plate fixed to a surface of the circuit board at a side of the first and second probes and configured to come into electric contact with a collector electrode of the power device;
• a block-shaped first connecting terminal and a block-shaped second connecting terminal provided at a tester and configured to come into electric contact with the wiring pattern to which each of the first probe and the second probe is connected;
• and
• a block-shaped third connecting terminal provided at the tester and configured to come into electric contact with the contact plate by being inserted through a hole formed in the circuit board.