Piezoelectric device
AssigneeNational Tsing Hua University
InventorsChien-Chong HONG, Alan CHEN, Tong-Miin LIOU
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Abstract
A piezoelectric device includes a nanoimprinted film which is made from a ferroelectric polymer having a first conformation state and coated on a substrate. The ferroelectric polymer is heated at a temperature between a Curie point (Tc) and a melting point (Tm) of the ferroelectric polymer to cause a change in conformation of the ferroelectric polymer from the first conformation state to a second conformation state, and is then subjected to a nanoimprinting process at an imprinting temperature lower than Tc to cause a change in conformation of the ferroelectric polymer from the second conformation state to a third conformation state that is different from the first conformation state, thereby obtaining the nanoimprinted film.
Claims8
A piezoelectric device made by the following steps of:
- (a) providing a coating material including a ferroelectric polymer;
- (b) applying said coating material onto a lower substrate unit to obtain a coated film in which said ferroelectric polymer has a first conformation state;
- (c) heating said coated film at a heating temperature between a Curie point (Tc) and a melting point (Tm) of said ferroelectric polymer to cause a change in conformation of said ferroelectric polymer from the first conformation state to a second conformation state;
- and
- (d) subjecting said heat-treated coated film to a nanoimprinting process at an imprinting temperature lower than Tc to cause a change in conformation of said ferroelectric polymer from the second conformation state to a third conformation state that is different from the first conformation state, thereby obtaining a nanoimprinted film.
Dependencies are inferred from the claim text.