Acoustic resonator comprising aluminum scandium nitride and temperature compensation feature
AssigneeAvago Technologies General IP (Singapore) Pte. Ltd.
InventorsQiang Zou, Chris Feng, Phil Nikkel, Kevin J. Grannen, Tangshiun Yeh, Dariusz Burak, John Choy, Tina L. Lamers
Life of this patent
Estimating the term…
Abstract
An acoustic resonator structure comprises a first electrode disposed on a substrate, a piezoelectric layer disposed on the first electrode and comprising aluminum scandium nitride, a second electrode disposed on the piezoelectric layer, and a temperature compensation feature having a temperature coefficient offsetting at least a portion of a temperature coefficient of the piezoelectric layer, the first electrode, and the second electrode.
Claims20
An acoustic resonator structure, comprising:
- a first electrode disposed on a substrate;
- a piezoelectric layer disposed on the first electrode and comprising aluminum scandium nitride;
- a second electrode disposed on the piezoelectric layer;
- and
- a temperature compensation feature having a temperature coefficient offsetting at least a portion of a temperature coefficient of the piezoelectric layer, the first electrode, or the second electrode.
An acoustic resonator structure, comprising:
- a first electrode disposed on a substrate;
- a piezoelectric layer disposed on the first electrode and comprising a piezoelectric material combined with at least one rare earth element;
- a second electrode disposed on the piezoelectric layer;
- and
- a temperature compensation feature having a temperature coefficient offsetting at least a portion of a temperature coefficient of the piezoelectric layer, the first electrode, or the second electrode.
Dependencies are inferred from the claim text.