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AssigneePhysik Instrumente (Pi) GmbH & Co. KG
InventorWladimir Wischnewskiy
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Ultrasonic actuator (1) for a linear ultrasonic motor for driving a positioning element (7), which is pressed along at least one friction track (8) with a predefined force (F) in the ultrasonic motor to effect a linear movement thereof, wherein the ultrasonic actuator (1) comprises: at least one primary waveguide resonator (2), with each of which one primary generator (3) is in flat contact in order to form an acoustic standing wave, at least one auxiliary waveguide resonator (4), with each of which one auxiliary generator is in contact in order to form an acoustic standing wave at least one crosspiece (6), wherein each of the at least one crosspieces (6) connects one of the at least one primary waveguide resonators (2) and one of the at least one auxiliary waveguide resonators (4) to each other at least in sections, and wherein at least one friction track (8) or friction rail (41) is arranged on the crosspiece (6) wherein the at least one primary waveguide resonator (2) and the at least one auxiliary waveguide resonator (4) is/are designed as an open linear waveguide, and the at least one crosspiece (6) functions as a totalising device of the acoustic standing waves propagated in the primary and auxiliary waveguide resonators (2, 4), so that the at least one crosspiece (6) functions as the generator of a simulated travelling wave, which is usable for driving the positioning element (7).
Ultrasonic actuator (1) for a linear ultrasonic motor for driving a positioning element (7), which is pressed along at least one friction track (8) with a predefined force (F) in the ultrasonic motor to effect a linear movement thereof, wherein the ultrasonic actuator (1) comprises:
The ultrasonic actuator (1) according to either of the preceding claims, wherein the ultrasonic actuator has two or more primary waveguide resonators (2) and a corresponding number of auxiliary waveguide resonators (4) with crosspieces (6), which set the positioning element (7) in motion.
The ultrasonic actuator (1) according to any of the preceding claims, wherein acoustic bending standing waves or acoustic longitudinal standing waves or acoustic standing shear waves or other acoustic standing waves having the same frequency are generated in the primary and auxiliary waveguide resonators (2, 4), and are propagated along the length of the resonators.
The ultrasonic actuator (1) according to any of the preceding claims, wherein the width of each crosspiece (6) is smaller than or equal to half the wavelength of the generated acoustic standing wave.
The ultrasonic actuator (1) according to any of the preceding claims, wherein the thickness of each crosspiece (6) is smaller than or equal to a quarter of the wavelength of the generated standing wave.
The ultrasonic actuator (1) according to any of the preceding claims, wherein the primary and auxiliary waveguide resonators of the acoustic standing waves are constructed from metal, metal ceramic, oxide ceramic, Sital or glass as passive waveguide resonators, and represent the generators for the acoustic waves of the piezoelements connected to these resonators.
The ultrasonic actuator (1) according to any of the preceding claims, wherein the crosspiece is made from the same material as the primary and auxiliary waveguide resonators.
The ultrasonic actuator (1) according to any of the preceding claims, wherein the friction guidance rail (41) has a rectangular shape or a triangular shape or a trapezoidal shape or a round shape.
The ultrasonic actuator (1) according to any of the preceding claims, wherein the friction track (8) or the friction rail (41) has transverse slots (84).
The ultrasonic actuator (1) according to any of the preceding claims, wherein the positioning element (7) comprises one or more friction layers (9) that is/are in operative connection with the friction track (8) or the friction guide rail (41).
Linear ultrasonic motor, comprising an ultrasonic actuator (1) according to any of the preceding claims and a positioning element (7) that may be set in linear motion by the ultrasonic actuator (1), and a guidance device for guiding the positioning element (7) in the ultrasonic motor.
Dependencies are inferred from the claim text.