Magnetic bearing apparatus and method for reducing vibration caused by magnetic bearing apparatus
AssigneeEbara Corporation
InventorToshimitsu BARADA
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AssigneeEbara Corporation
InventorToshimitsu BARADA
Estimating the term…
A magnetic bearing apparatus for supporting a rotational shaft includes a magnetic bearing, a rotation sensor, a controller which controls an electric current flown to an electromagnet, and at least one vibration sensor. The controller controls the electric current flown to the electromagnet as follows: in a first control mode, a first electric current is flown to the electromagnet for levitating and supporting the rotational shaft; and in a second control mode, a second electric current is flown to the electromagnet in place of the first electric current at a first periodic timing which is detected by the rotation sensor so that vibration is reduced to a lower level than a first vibration value detected in the first control mode in at least one of setting location of the at least one vibration sensor.
A magnetic bearing apparatus for supporting a rotational shaft, the magnetic bearing apparatus comprising:
A method for reducing vibration caused by a magnetic bearing apparatus which supports a rotational shaft, the method comprising:
A magnetic bearing apparatus for supporting a rotational shaft, the magnetic bearing apparatus comprising:
Dependencies are inferred from the claim text.