Systems and Methods for Supporting a Movable Element of an Electromechanical Device

A method for manufacturing an electromechanical device comprising:

• providing a substrate;
• depositing a first layer of material over the substrate;
• patterning the first layer of material to form a movable body, a compliant support beam coupled to the movable body, an anchor, and an actuator beam spaced apart from the compliant support beam, the movable body being movable along an axis of a direction of motion, the compliant support beam being coupled to the anchor via a first end and coupled to the movable body via a connector portion, the compliant support beam including an actuating portion extending from the anchor and in a direction that is transverse to the axis of the direction of motion and away from the anchor, the actuating portion being arranged adjacently and spaced apart from the actuator beam, the connector portion being contiguous with the actuating portion and coupled to the movable body, the connector portion extending at least partially back towards the anchor while being arranged adjacently and spaced apart from the actuating portion.