Thermally enhanced semiconductor assembly with embedded chip and interposer and method of manufacturing the same

Abstract

The present invention relates to a method of making a thermally conductive semiconductor assembly. In accordance with a preferred embodiment, the method includes: providing a chip; providing an interposer that includes a through via, a first contact pad on a first surface and a second contact pad on an opposite second surface; electrically coupling the chip to the first contact pad of the interposer by a conductive bump or a wire; providing a heat sink with a cavity; then attaching the chip and the interposer on the heat sink using an adhesive with the chip inserted into the cavity; and then forming a build-up circuitry on the second surface of the interposer. Accordingly, the heat sink can provide essential thermal dissipation for the embedded chip, and the interposer and build-up circuitry can respectively provide first and second level fan-out routing/interconnection for the embedded chip.

Dependencies are inferred from the claim text.