Copper wire bonding structure in semiconductor device and fabrication method thereof
OwnerHua Pan, Yueh-Se Ho +3inventors
InventorsHua Pan, Yueh-Se Ho, Jun Lu, Ming-Chen Lu, Zhiqiang Niu
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OwnerHua Pan, Yueh-Se Ho +3inventors
InventorsHua Pan, Yueh-Se Ho, Jun Lu, Ming-Chen Lu, Zhiqiang Niu
Estimating the term…
A semiconductor device comprises a first top electrode and a second top electrode at a front surface of the die, at least a Ni plating layer and an Au plating layer overlaying the Ni plating layer are formed on each of the first top electrode and the second top electrode. A copper clip attaches on the Au plating layer of the second top electrode. A gold (Au) stud bump is formed on the Au plating layer of the first top electrode with a copper wire connected on the stud bump. The Au stud bump is thicker than a thickness of the Au plating layer and thinner than a thickness of the copper clip to avoid copper wire NSOP (non-stick on pad) problem due to Ni plating layer diffusion during the solder reflow process in the copper clip attachment.
A semiconductor device comprising:
A fabrication method for a semiconductor device comprising the steps of:
Dependencies are inferred from the claim text.