Semiconductor image sensor module and method of manufacturing the same

An image sensor comprising:

• a first semiconductor part including a plurality of pixels arranged in a first array, respective ones of the pixels including a photoelectric conversion element, and
• a second semiconductor part including a plurality of analog/digital converters arranged in a second array;
• and
• a third semiconductor part including a memory element array provided with at least a decoder and a sense amplifier,
• wherein the first, second, and third semiconductor parts are electrically connected to one another, and
• at least two of the first, second, and third semiconductor parts are electrically connected through a penetration contact portion passing through at least one of the first, second, and third semiconductor parts.

A method of making an image sensor module, comprising the steps of:

• forming a first semiconductor part, the first semiconductor part including a plurality of pixels arranged in a first array, respective ones of the pixels including a photoelectric conversion element;
• forming a second semiconductor part, the second semiconductor part including a plurality of analog/digital converters arranged in a second array;
• forming a third semiconductor part, the third semiconductor part including a memory element array provided with at least a decoder and a sense amplifier;
• and
• electrically connecting the first, second, and third semiconductor parts to one another,
• wherein at least two of the first, second, and third semiconductor parts are electrically connected through a penetration contact portion passing through at least one of the first, second, and third semiconductor parts.