Dual-side micro gas sensor and method of fabricating the same
AssigneeElectronics and Telecommunications Research Institute
InventorsHyung-Kun LEE, Seungeon MOON, Nak Jin CHOI, Jaewoo LEE
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Abstract
Provided are a dual-side micro gas sensor and a method of fabricating the same. The sensor may include an elastic layer, a heat-generating resistor layer on the elastic layer, an interlayered insulating layer on the heat-generating resistor layer, an upper sensing layer on the interlayered insulating layer, and a lower sensing layer provided below the elastic layer to face the heat-generating resistor layer, thereby reducing heat loss of the heat-generating resistor layer.
Claims13
A dual-side micro gas sensor, comprising:
- an elastic layer;
- a heat-generating resistor layer on the elastic layer;
- an interlayered insulating layer on the heat-generating resistor layer;
- an upper sensing layer on the interlayered insulating layer;
- and
- a lower sensing layer provided below the elastic layer to face the heat-generating resistor layer, the lower sensing layer reducing heat loss of the heat-generating resistor layer.
A method of fabricating a dual-side micro gas sensor, comprising:
- forming a lower electrode on a substrate;
- forming an elastic layer on the lower electrode and the substrate;
- forming a heat-generating resistor layer on the elastic layer;
- forming an interlayered insulating layer on the heat-generating resistor layer;
- forming an upper electrode on the interlayered insulating layer;
- forming an upper sensing layer on the upper electrode and the interlayered insulating layer;
- etching a portion of the substrate to form an opening exposing the lower electrode;
- and
- forming a lower sensing layer in the opening to cover the lower electrode and the elastic layer.
Dependencies are inferred from the claim text.