Plasmonically enhanced electro-optic devices and methods of production

Abstract

A plasmonically enhanced electro-optic device includes a dielectric layer; a plurality of nanopillars arranged in a periodic array such that each nanopillar has a protruding portion that extends beyond a surface of the dielectric layer; a metallic layer formed on the surface of the dielectric layer and on portions of the plurality of nanopillars by an oblique directional deposition such that the metallic layer defines a periodic array of nano-holes and nano-antennas, each nano-hole of the periodic array of nano-holes being in a deposition shadow region of a corresponding nanopillar; and an electrode electrically connected to at least one nanopillar of the plurality of nanopillars at an end opposing the protruding portion thereof. Each nanopillar of the plurality of nanopillars includes a photo-absorption material, and the periodic array of nano-holes and nano-antennas have at least one of dimensions, uniformity or periodicity selected to enhance coupling of incident light into the plurality of nanopillars through excitation of surface plasmons.

Dependencies are inferred from the claim text.