Recessed Contact to Semiconductor Nanowires
AssigneeSol Voltaics AB
InventorsIngvar Åberg, Martin Magnusson, Damir Asoli, Lars Ivar Samuelson, Jonas Ohlsson
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Abstract
A semiconductor nanowire device includes at least one semiconductor nanowire having a bottom surface and a top surface, an insulating material which surrounds the semiconductor nanowire, and an electrode ohmically contacting the top surface of the semiconductor nanowire. A contact of the electrode to the semiconductor material of the semiconductor nanowire is dominated by the contact to the top surface of the semiconductor nanowire.
Claims40
A semiconductor nanowire device, comprising:
- at least one semiconductor nanowire having a bottom surface and a top surface;
- an insulating material which surrounds the semiconductor nanowire;
- and
- an electrode ohmically contacting the top surface of the semiconductor nanowire, wherein a contact of the electrode to the semiconductor material of the semiconductor nanowire is dominated by the contact to the top surface of the semiconductor nanowire.
A method of making a semiconductor nanowire device, comprising:
- forming at least one semiconductor nanowire, the semiconductor nanowire having a catalyst particle on a top surface of the semiconductor nanowire or a sacrificial portion comprising the top surface;
- forming an insulating material around the semiconductor nanowire;
- removing the catalyst particle or the sacrificial portion to recess the top surface of the nanowire below a top surface of the insulating material;
- and
- forming an electrode in ohmic contact with the top surface of the nanowire.
A semiconductor nanowire device, comprising:
- at least one semiconductor nanowire having a bottom surface and a top surface;
- an insulating material which surrounds the semiconductor nanowire and extends above the top surface of the nanowire to create a recess between a sidewall of the insulating material and the top surface of the nanowire;
- and
- an electrode filling the recess and ohmically contacting the top surface of the nanowire.
Dependencies are inferred from the claim text.