Ion Source, Nanofabrication Apparatus Comprising Such Source, and a Method for Emitting Ions

A method for emitting ions comprising:

• providing a chamber having at least one entry port and one exit aperture, and a tip having an apex located in the chamber, wherein the apex has a surface made of a metallic second species,
• injecting matter into the chamber through the entry port, wherein said matter comprises at least a first species,
• wherein said first species and metallic second species have different ionization voltages,
• setting operative conditions of the chamber to a first operative setting, including at least a temperature and a pressure inside the chamber, and a voltage, to generate ions of said first species,
• applying said voltage to said tip to ionise species inside said chamber, thereby generating ions of said gaseous first species,
• moving said ions out from the chamber through the exit aperture,
• setting operative conditions of the chamber to a second operative setting, including at least a temperature and a pressure inside the chamber, and said voltage, to generate ions of said metallic second species,
• applying said voltage to said tip to ionise species inside said chamber, thereby generating ions of said non-gaseous second species,
• moving said ions out from the chamber through the exit aperture.

A ion source comprising:

• a chamber having at least one entry port and one exit aperture,
• a thermal system, adapted to place the chamber at a temperature,
• an injection adapted to inject matter into the chamber through the entry port, wherein said matter comprises at least two different species,
• wherein a first species has a lower vaporization temperature and a higher ionisation voltage than a second species,
• a tip located in the chamber,
• a generator, adapted to apply a voltage to said tip to ionise said matter inside said chamber, thereby generating ions of said species,
• a voltage regulator adapted to set the voltage at least at a first value between the ionisation voltages of the second and first species, and at a second value greater than the ionisation voltage of the first species,
• an extractor, adapted to move said ions out from the chamber through the exit aperture,
• wherein the temperature system comprises a temperature regulator, adapted to set the temperature at least at a first value between the vaporization temperature of the first and second species and a second value greater than the vaporization temperature of the second species.

A gas-field ion source comprising:

• a chamber having at least one entry port and one exit aperture,
• an injection adapted to inject matter into the chamber through the entry port, wherein said matter comprises at least a first species which is gaseous under operative conditions,
• a tip located in the chamber,
• a generator, adapted to apply a voltage to said tip to ionise species inside said chamber, thereby generating ions of said species,
• an extractor, adapted to move said ions out from the chamber through the exit aperture,
• a hollow tube carrying the tip and having a first end forming the entry port.