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US 2014/0175279 A1Published application
Charged particle beam apparatus
AssigneeHitachi High-Technologies Corporation
InventorToshihide Agemura
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AssigneeHitachi High-Technologies Corporation
InventorToshihide Agemura
Estimating the term…
A charged particle beam apparatus that easily discriminates the angles and energy of the SE or the BSE, and images information necessary for a sample to be observed. The charged particle beam apparatus having a charged particle source that emits a primary charged particle beam, a condenser lens that condenses the primary charged particle beam on a sample, and a detector that detects secondary charged particles emitted from a radiated point on the sample, the charged particle beam apparatus including: a pulse processing unit that subjects a signal from the detector to pulse processing, and creates energy distribution information of the secondary charged particles; and a control unit that selects information in an arbitrary energy region of the energy distribution information, and display an image on a display unit.
A charged particle beam apparatus having a charged particle source that emits a primary charged particle beam, a condenser lens that condenses the primary charged particle beam on a sample, and a detector that detects secondary charged particles emitted from a radiated point on the sample, the charged particle beam apparatus comprising:
Dependencies are inferred from the claim text.