Spectral Imaging Device and Method to Calibrate the Same
AssigneeImec
InventorsPilar Gonzalez, Murali Jayapala, Andy Lambrechts, Klaas Tack
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Abstract
A solid-state spectral imaging device is described. The device includes an image sensor and a plurality of optical filters directly processed on top of the image sensor. Each optical filter includes a first mirror and a second mirror defining an optical filter cavity having a fixed height. Each optical filter also includes a first electrode and a second electrode having a fixed position located opposite to each other and positioned to measure the height of the optical filter cavity. Further, a method to calibrate spectral data of light and a computer program for calibrating light is described.
Claims15
A solid-state spectral imaging device, comprising:
- an image sensor;
- and
- a plurality of optical filters directly processed on top of the image sensor, each optical filter comprising a first mirror and a second mirror defining an optical filter cavity, wherein the optical filter cavity has a fixed height;
- and wherein each optical filter further comprising a first electrode and a second electrode having a fixed position located opposite to each other and positioned to measure the height of the optical filter cavity.
A method for calibrating spectral data of light detected by a solid-state spectral imaging device, the method comprising:
- filtering light using an optical filter, the optical filter comprising a first mirror and a second mirror defining an optical filter cavity, wherein the optical filter cavity is filled with a solid material;
- recording filtered light and storing spectral data of the filtered light;
- determining a height of the optical filter cavity;
- determining a central wavelength of a spectral band of the optical filter using the determined height of the optical filter cavity;
- and
- calibrating the stored spectral data of the filtered light using the determined central wavelength of the spectral band of the optical filter.
A computer program product for calibrating spectral data of light detected by a solid-state spectral imaging device, comprising:
- receiving spectral data of light filtered by an optical filter, the optical filter comprising a first mirror and a second mirror defining an optical filter cavity, wherein the optical filter cavity is filled with a solid material;
- receiving a dielectric capacitance value of the optical filter;
- determining a height of the optical filter cavity from the dielectric capacitance value;
- and
- calibrating the spectral data of light using the determined height of the optical filter cavity.
Dependencies are inferred from the claim text.