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US 2014/0175052 A1Published application
Method for preparing zero-mode waveguide arrays with coated walls
AssigneePacific Biosciences of California, Inc.
InventorsJeremy Gray, Ronald L. Cicero, Annette Grot
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Abstract
The application relates to methods of manufacture of improved optical containment structures. The invention relates to arrays of zero-mode waveguide structures comprising nanoscale apertures having non-reflective coatings on their walls. The methods provide for selectively coating the walls of the zero mode waveguides, allowing for selective functionalization of the bases.
Claims16
A method for coating a non-reflective layer on the walls of zero mode waveguide comprising:
- providing an array of zero mode waveguides comprising an opaque layer on top of a transparent substrate layer wherein the zero mode waveguides comprise nanoscale apertures extending through the opaque layer and extending into the transparent layer, each zero mode waveguide having walls and a base;
- coating the array of zero mode waveguides such that the walls and the bases are coated with a non-reflective layer;
- etching back the non-reflective layer to expose the transparent substrate at the bases of the zero mode waveguides, thereby producing a non-reflective layer selectively on the walls of the zero mode waveguides.
Dependencies are inferred from the claim text.