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US 2014/0175048 A1Published application
Electrical lapping guide for manufacture of a scissor style magnetic sensor
AssigneeHGST Netherlands B.V.
InventorsDavid P. Druist, Quang Le, Yang Li, David J. Seagle, Petrus A. Van Der Heijden
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Abstract
A method of manufacturing a magnetic sensor having a hard bias structure located at a back edge of the sensor. The method forms an electrical lapping guide that is compatible for use with such a sensor having a back edge hard bias structure and which can accurately determine a termination point for a lapping operation that forms an air bearing surface of the slider and determines the sensor stripe height.
Claims18
A method of manufacturing a magnetic sensor, comprising:
- depositing a sensor material;
- depositing an electrically conductive material in an electrical lapping guide region;
- forming a mask, the mask having an opening with an edge configured to define a hack edge of a sensor and having first and second openings the distance between which is defines an electrical lapping guide;
- performing an ion milling to remove material not protected by the mask structure;
- and
- depositing an electrical insulation layer and a magnetic hard bias layer.
3 more elements
A method for manufacturing a magnetic sensor, comprising:
- forming a sensor layer having a track-width;
- forming a mask having a first opening with an edge that is configured to define a sensor back edge and having a second opening defining an electrical lapping guide;
- performing an ion milling to remove material exposed through the first and second openings;
- depositing a layer of electrically insulating material and a layer of hard magnetic bias material over the layer of electrically insulating material;
- and
- performing a chemical mechanical polishing.
3 more elements
Dependencies are inferred from the claim text.