High flow xef2 canister
AssigneeQUALCOMM MEMS Technologies, Inc.
InventorTeruo Sasagawa
Life of this patent
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Abstract
This disclosure provides systems, methods and apparatus for delivery of gas from solid phase sources. A solid phase gas source canister can include multiple separated volumes configured to contain multiple quantities of a solid phase gas source. Sublimated vapor can be independently produced by each quantity of the solid phase gas source. In some implementations, the solid phase gas source canisters are configured for simultaneous fill of the multiple volumes with a solid source gas phase powder.
Claims22
A solid phase source gas delivery system comprising:
- a cylindrical inner container including a plurality of separated volumes configured to contain a plurality of separated quantities of a solid phase gas source, the volumes separated by shelves configured to support the quantities of the solid phase gas source;
- a central tube extending through the inner container in fluid communication with the separated volumes;
- and
- a side cover movable to access the separated volumes.
A solid phase source gas delivery system comprising:
- containing means for containing a plurality of separated quantities of a solid phase gas source;
- and
- means for simultaneously introducing the separated quantities of the solid phase gas source to the delivery system.
A method of filling a solid phase source canister, comprising:
- providing an inner container including a plurality of volumes separated by shelves;
- blocking open holes of the inner container;
- opening a side of the inner container;
- partially filling the separated volumes with a solid phase gas source;
- replacing the side cover;
- positioning the inner container upright;
- and
- opening the blocked holes of the inner container.
Dependencies are inferred from the claim text.