Depositing nano-dots on a substrate
AssigneeHewlett-Packard Development Company, L.P.
InventorsPeter Mardilovich, Qingqiao Wei, Anthony M. Fuller
Life of this patent
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Abstract
A method of depositing nano-dots on a substrate includes forming a template on the base, the template defining nano-pores, at least partially filling the nano-pores with a pillar material to define nano-pillars, depositing a dot material on the nano-pillars to define nano-dots on the nano-pillars, and contact printing the substrate with the array of nano-dots.
Claims15
A method of depositing nano-dots on a substrate, the method comprising comprising:
- forming a template on the base, the template defining nano-pores;
- at least partially filling the nano-pores with a pillar material to define nano-pillars;
- depositing a dot material on the nano-pillars to define nano-dots on the nano-pillars;
- and
- contact printing the substrate with the array of nano-dots.
A method of depositing nano-dots on a substrate having a substrate surface, the method comprising:
- forming a template on a base, the template defining an array of substantially uniform nano-pores;
- at least partially filling the nano-pores with pillar material to define an array of substantially uniform nano-pillars on the base;
- depositing dot material on the nano-pillars to define an array of substantially uniform nano-dots on the nano-pillars;
- bringing the base and substrate together to place the nano-dots into substantially uniform contact with the substrate surface;
- and
- separating the base and substrate, the nano-dots separating from the nano-pillars and adhering to the substrate surface to leave the nano-dots on the substrate surface.
A method of depositing nano-dots on a substrate having a substrate surface, the method comprising:
- depositing a first oxidizable material onto a base;
- depositing a second oxidizable material onto the first oxidizable material;
- anodizing the second oxidizable material to form a porous oxide having nano-pores that extend through the porous oxide to expose portions of the first oxidizable material;
- anodizing the first oxidizable material so as to partially fill the nano-pores in the porous oxide with a pillar material including an oxide of the first oxidizable material, thereby forming an array of nano-pillars of substantially uniform height on the base;
- electrochemically depositing a dot material on the nano-pillars so as further fill the nano-pores in the porous oxide with a dot material different from the pillar material;
- removing porous oxide by selective etching, thereby yielding a substantially planar array of nano-dots on nano-pillars;
- bringing the base and substrate together to place the array of nano-dots into substantially uniform contact with the substrate surface;
- and
- separating the base and substrate, the nano-dots separating from the nano-pillars and adhering to the substrate surface to leave the array of nano-dots on the substrate surface.
Dependencies are inferred from the claim text.