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US 2014/0174911 A1Published application
Methods and Systems for Reducing Particles During Physical Vapor Deposition
AssigneeIntermolecular, Inc.
InventorChi-I Lang
Life of this patent
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Abstract
Embodiments provided herein describe methods and systems for depositing material onto a surface. A target including a material in a porous state is provided. The density of the material in the porous state is less than 89% of the absolute density of the material. The target is positioned over a surface. At least some of the material is caused to be ejected from the target and deposited onto the surface.
Claims20
A method for depositing a material, the method comprising:
- providing a target,
- wherein the target comprises a material in a porous state,
- wherein a density of the material in the porous state is less than 89% of an absolute density of the material;
- positioning the target over a surface;
- and
- causing at least some of the material to be ejected from the target and deposited on the surface.
3 more elements
A method for depositing material, the method comprising:
- providing a target,
- wherein the target comprises a material in a porous state,
- wherein a density of the material in the porous state is between 50% and 89% of an absolute density of the material;
- positioning the target over a substrate;
- and
- causing at least some of the material to be ejected from the target and deposited on the substrate.
3 more elements
A substrate processing tool comprising:
- a housing comprising a sidewall and a lid, the housing defining a processing chamber;
- a substrate support coupled to the housing and configured to support a substrate within the processing chamber;
- a target coupled to the housing such that the target is exposed to the processing chamber,
- wherein the target comprises a material in a porous state,
- wherein a density of the material in the porous state is less than 89% of an absolute density of the material;
- and
- a power supply coupled to the target and configured to provide direct current (DC) power to the target to cause the material to be ejected from the target and deposited on the substrate.
4 more elements
Dependencies are inferred from the claim text.