Heat radiating substrate and manufacturing method thereof
AssigneeSamsung Electro-Mechanics Co., Ltd.
InventorsJoon Seok KANG, Kwang Jik Lee, Sang Hyun Shin, Hye Suk Shin
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Abstract
A heat radiating substrate having strengthened insulation resistance and heat conductivity, and a manufacturing method thereof. The method for manufacturing a heat radiating substrate includes: preparing a metal substrate; performing an anodizing process on the metal substrate to form an anodic oxidation layer; filling surface pores of the anodic oxidation layer with an insulating material; and forming a metal wiring layer on the anodic oxidation layer. High insulation resistance and heat conductivity can be obtained by filling surface pores formed in an anodizing process with an insulating material.
Claims28
A heat radiating substrate comprising:
- a metal substrate forming a core of the heat radiating substrate;
- an anodic oxidation layer formed on the metal substrate;
- an insulating material filling surface pores of the anodic oxidation layer;
- and
- a metal wiring layer formed on the anodic oxidation layer.
A method for manufacturing a heat radiating substrate, the method comprising:
- preparing a metal substrate;
- performing an anodizing process on the metal substrate to form an anodic oxidation layer;
- filling surface pores of the anodic oxidation layer with an insulating material;
- and
- forming a metal wiring layer on the anodic oxidation layer.
A method for manufacturing a heat radiating substrate, the method comprising:
- preparing a metal substrate;
- forming a through hole in the metal substrate;
- performing an anodizing process on the metal substrate with the through hole formed therein to form an anodic oxidation layer;
- filling surface pores of the anodic oxidation layer and the through hole with an insulating material;
- removing the insulating material filled in the through hole;
- and
- forming a metal wiring layer on the anodic oxidation layer.
A method for manufacturing a heat radiating substrate, the method comprising:
- preparing a metal substrate;
- forming a through hole in the metal substrate;
- performing a plugging process to fill the through hole with an insulating material;
- performing an anodizing process on the metal substrate with the through hole formed therein to form an anodic oxidation layer;
- filling surface pores of the anodic oxidation layer with an insulating material;
- removing the insulating material filled in the through hole;
- and
- forming a metal wiring layer on the anodic oxidation layer.
A method for manufacturing a heat radiating substrate, the method comprising:
- preparing a metal substrate;
- performing an anodizing process on the metal layer to form an anodic oxidation layer;
- filling surface pores of the anodic oxidation layer with an insulating material;
- forming a through hole with an insulating material;
- performing a plugging process to fill the through hole with an insulating material;
- removing the insulating material filled in the through hole;
- and
- forming a metal wiring layer on the anodic oxidation layer.
Dependencies are inferred from the claim text.