Liquid processing apparatus, liquid processing method, and storage medium for liquid process

A liquid processing method using a liquid processing apparatus comprising:

• a process liquid container configured to contain a process liquid;
• a discharge nozzle configured to discharge the process liquid to a substrate to be processed;
• a supply conduit connecting the process liquid container and the discharge nozzle;
• a filter disposed in the supply conduit and configured to filtrate the process liquid;
• a pump disposed in the supply conduit on a secondary side of the filter;
• a return conduit connecting a discharge side of the pump and a primary side of the filter;
• a first, a second and a third on-off valves which are disposed on a connection portion between the pump and the filter, a connection portion between the pump and the discharge nozzle, and a connection portion between the pump and the return conduit, respectively;
• and
• a control unit configured to control the pump and the first, the second and the third on-off valves;
• the liquid processing method comprising:
• sucking into the pump a predetermined amount of the process liquid having passed through the filter by the suction of the pump;
• discharging a part of the process liquid sucked in the pump from the discharge nozzle;
• returning the remaining process liquid in the pump to the primary side of the filter;
• and
• synthesizing a process liquid by adding a replenishment amount, which is equal to the discharge amount, to the return amount;
• and
• discharging the synthesized process liquid and filtrating the synthesized process liquid by the filter the number of times corresponding to a rate between the discharge amount and the return amount.

A computer-readable storage medium for liquid process storing a software that causes a computer to execute a control program, the computer-readable storage medium being used in a liquid processing apparatus comprising:

• a process liquid container configured to contain a process liquid;
• a discharge nozzle configured to discharge the process liquid to a substrate to be processed;
• a supply conduit connecting the process liquid container and the discharge nozzle;
• a filter disposed in the supply conduit and configured to filtrate the process liquid;
• a pump disposed in the supply conduit on a secondary side of the filter;
• a return conduit connecting a discharge side of the pump and a primary side of the filter;
• a first, a second and a third on-off valves which are disposed on a connection portion between the pump and the filter, a connection portion between the pump and the discharge nozzle, and a connection portion between the pump and the return conduit, respectively;
• and
• a control unit configured to control the pump and the first, the second and the third on-off valves;
• wherein the control program is programmed to perform:
• sucking into the pump a predetermined amount of the process liquid having passed through the filter by the suction of the pump;
• discharging a part of the process liquid sucked in the pump from the discharge nozzle;
• returning the remaining process liquid in the pump to the primary side of the filter;
• and
• synthesizing a process liquid by adding a replenishment amount, which is equal to the discharge amount, to the return amount;
• and
• discharging the synthesized process liquid and filtrating the synthesized process liquid by the filter the number of times corresponding to a rate between the discharge amount and the return amount.