Heat treatment device

A heat treatment device comprising:

• a processing container configured to accommodate a plurality of substrates to be subjected to a heat treatment;
• a substrate holding member configured to hold the plurality of substrates inside the processing container;
• an induction heating coil configured to form an induction magnetic field inside the processing so as to perform induction heating;
• a high frequency power supply configured to apply a high frequency power to the induction heating coil;
• a gas supply mechanism configured to supply one or more processing gases to the inside of the processing container;
• an exhaust mechanism configured to exhaust the inside of the processing container;
• and
• an induction heating element provided between the induction heating coil and the substrate holding member so as to enclose the substrate holding member inside the processing container, the induction heating element being heated by an induction electric current formed by the induction magnetic field and the plurality of substrates held by the substrate holding element being heated by radiation heat from the induction heating element,
• wherein the flow of the induction electric current to the plurality of substrates is blocked by the induction heating element.