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US 2014/0174353 A1Published application
High-temperature grade steel for fluidized bed reactor equipment
AssigneeREC Silicon Inc
InventorsMichael V. Spangler, Matthew J. Miller
Life of this patent
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Abstract
Embodiments of a reaction chamber liner for use in a heated silicon deposition reactor are disclosed. The liner has an upper portion, a mid portion comprising a material other than a stainless steel alloy, and a lower portion comprising a martensitic stainless steel alloy. The liner's upper portion may have a composition substantially similar to the lower portion.
Claims20
A reaction chamber liner for use in a heated silicon deposition reactor, the liner having an inner surface configured to define a portion of a reaction chamber, the inner surface comprising:
- an upper portion;
- a mid portion comprising a material other than a stainless steel alloy;
- and
- a lower portion wherein at least a portion of the inner surface of the lower portion is a martensitic stainless steel alloy.
1 more element
Dependencies are inferred from the claim text.