Apparatus and methods of mixing and depositing thin film photovoltaic compositions
AssigneeGlobal Solar Energy, Inc.
InventorsJeffrey S. BRITT, Scott WIEDEMAN
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Abstract
Improved methods and apparatus for forming thin-film layers of semiconductor material absorber layers on a substrate web. According to the present teachings, a semiconductor layer may be formed in a multi-zone process whereby various layers are deposited sequentially onto a moving substrate web. At least one layer is deposited from a mixed gallium indium source.
Claims20
A vapor deposition apparatus for use in manufacturing thin-film photovoltaic semiconductors, comprising:
- a roll-to-roll assembly configured to transport a flexible substrate through plural zones along a processing path;
- at least one zone having a substantially enclosed gallium and indium deposition assembly configured to deposit a layer comprised of gallium and indium in the presence of selenium gas onto the substrate;
- and
- a crucible containing pre-mixed gallium and indium in a predetermined ratio;
- wherein the gallium and indium deposition assembly is configured to deposit gallium and indium evaporated from the crucible.
An apparatus for depositing a mixture of gallium and indium onto a flexible substrate, comprising:
- a first crucible containing pre-mixed gallium and indium and a heating element in thermal communication with the crucible;
- a vapor manifold connected to the crucible such that vapor may pass from the crucible to the manifold;
- and
- a nozzle connected to the manifold through which a heated mixed gallium and indium vapor exits the source.
A vapor deposition apparatus for use in manufacturing thin-film photovoltaic semiconductors, comprising:
- a roll-to-roll assembly configured to transport a flexible substrate through plural zones along a processing path;
- a first gallium and indium deposition assembly configured to deposit a first layer including gallium and indium onto the substrate by evaporating pre-mixed gallium and indium from a first crucible in a first predetermined gallium to gallium indium ratio;
- and
- a second gallium and indium deposition assembly configured to deposit a second layer including gallium and indium onto the first layer by evaporating pre-mixed gallium and indium from a second crucible in a second predetermined gallium to gallium indium ratio.
Dependencies are inferred from the claim text.