Capacitive shear force sensor and method for fabricating thereof

A capacitive shear force sensor, comprising:

• a first electric field shielding layer, having a lower surface;
• a second electric field shielding layer, having an upper surface, wherein the second electric field shielding layer is disposed under the first electric field shielding layer;
• a driving electrode, disposed under the lower surface of the first electric field shielding layer, and disposed between the first electric field shielding layer and the second electric field shielding layer;
• a first sensing electrode, disposed on the upper surface of the second electric field shielding layer, and disposed between the driving electrode and the second electric field shielding layer, wherein the first sensing electrode and the driving electrode form a first capacitor;
• a second sensing electrode, disposed on the upper surface of the second electric field shielding layer, and disposed between the driving electrode and the second electric field shielding layer, wherein the second sensing electrode does not contact the first sensing electrode, and the second sensing electrode and the driving electrode form a second capacitor;
• and
• a dielectric layer, disposed between the driving electrode and the first sensing electrode, and disposed between the driving electrode and the second sensing electrode.