Device for Measuring a Pressure with at Least One Pressure Sensor Having at Least One Active Sensor Surface
AssigneePfeiffer Vacuum GmbH
InventorArmin Conrad
Life of this patent
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Abstract
A device for measuring pressure having at least one pressure sensor with at least one active sensor surface, an oscillating and/or variable temperature counter-surface arranged opposite the at least one sensor surface, wherein the sensor surface and the counter-surface are arranged in a hollow body, and the hollow body has at least one opening, and wherein at least one alternating signal amplifier is provided.
Claims9
A device for measuring pressure, comprising at least one pressure sensor having at least one active sensor surface, an oscillating and/or variable temperature counter-surface (4) arranged opposite the at least one sensor surface (3), the sensor surface (3) and the counter-surface (4) being arranged in a hollow body (8) or form a portion of a hollow body (8), wherein the hollow body (8) comprises at least one opening (10, 11);
- and at least one alternating signal amplifier (14).
Dependencies are inferred from the claim text.