Detection structure for a z-axis resonant accelerometer

A resonant accelerometer, comprising:

• a detection structure configured to detect a component of external linear acceleration directed along a vertical axis, the detection structure including:
• a substrate;
• elastic anchorage elements;
• an inertial mass anchored to the substrate by the elastic anchorage elements and suspended above said substrate, said elastic elements being configured to enable said inertial mass to perform an inertial movement of rotation about a first axis of rotation parallel to a horizontal axis belonging to a plane of main extension of said inertial mass, in response to an external acceleration acting along the vertical axis that is transverse with respect to said plane;
• first and second elastic supporting elements;
• and
• a first resonator element and a second resonator element, mechanically coupled to said inertial mass by the first and second elastic supporting elements, respectively, said elastic supporting elements being configured to enable a movement of rotation of said first resonator element and second resonator element, respectively about a second axis of rotation and a third axis of rotation, respectively, said second axis of rotation and third axis of rotation being parallel to one another, and parallel to the first axis of rotation of said inertial mass.

An electronic apparatus, comprising:

• a control unit;
• and
• a resonant accelerometer coupled to the control unit, the accelerometer including:
• a detection structure configured to detect a component of external linear acceleration directed along a vertical axis, the detection structure including:
• a substrate;
• elastic anchorage elements;
• an inertial mass anchored to the substrate by the elastic anchorage elements and suspended above said substrate, said elastic elements being configured to enable said inertial mass to perform an inertial movement of rotation about a first axis of rotation parallel to a horizontal axis belonging to a plane of main extension of said inertial mass, in response to an external acceleration acting along the vertical axis that is transverse with respect to said plane;
• first and second elastic supporting elements;
• and
• a first resonator element and a second resonator element, mechanically coupled to said inertial mass by the first and second elastic supporting elements, respectively, said elastic supporting elements being configured to enable a movement of rotation of said first resonator element and second resonator element, respectively about a second axis of rotation and a third axis of rotation, respectively, said second axis of rotation and third axis of rotation being parallel to one another, and parallel to the first axis of rotation of said inertial mass;
• a reading circuit coupled to the accelerometer;
• and
• a driving circuit coupled to the accelerometer.