Angular velocity detecting device
AssigneeHitachi, Ltd.
InventorsHeewon JEONG, Yasushi GOTO
Life of this patent
Estimating the term…
Abstract
A high-performance angular rate detecting device is provided. A driving part including a drive frame and a Coriolis frame is leviated by at least two fixing beams which share a fixed end and are extending in a direction orthogonal to a driving direction, thereby vibrating the driving part. Even when a substrate is deformed by mounting or heat fluctuation, internal stress generated to the fixed beam and a supporting beam is small, thereby maintaining a vibrating state such as resonance frequency and vibration amplitude constant. Therefore, a high-performance angular rate detecting device which is robust to changes in mounting environment can be obtained.
Claims8
1-9. (canceled)
An angular rate detecting device comprising:
- a substrate;
- a fixed part connected to the substrate;
- a drive frame connected to the fixed part via a plurality of beams and provided so as to vibrate in a drive direction;
- and
- a Coriolis frame connected to the fixed part via the drive frame and provided so as to vibrate in a detect direction perpendicular to the drive direction,
- wherein the plurality of beams includes at least two groups of beams, each of the groups of beams having:
- a first beam extending in the detect direction and connected to the fixed part;
- a second beam extending in the drive direction and connected to the first beam;
- and
- a third beam extending in the detect direction and connected to the second beam and the drive frame,
- wherein the two groups of beams are provided symmetrically with respect to an axis extended in the drive direction and through the fixed part, and
- wherein the first beams of the two groups are connected to the fixed part between the first beams.
Dependencies are inferred from the claim text.