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US 2014/0174179 A1Published application
Inertial sensor and method of manufacturing the same
AssigneeSamsung Electro-Mechanics Co., Ltd.
InventorsHyun Kee Lee, Sang Kee Yoon
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Abstract
Disclosed herein is an inertial sensor, including: a structural part for an accelerator sensor disposed on one surface, centered on a common post; and a structural part for an angular velocity sensor disposed on the other surface, centered on the common post, wherein a piezoresistor of the structural part for the accelerator sensor and a piezoelectric material of the structural part for the angular velocity sensor are formed on different surfaces.
Claims15
An inertial sensor, comprising:
- a structural part for an accelerator sensor disposed on one surface, centered on a common post;
- and
- a structural part for an angular velocity sensor disposed on the other surface, centered on the common post,
- wherein a piezoresistor of the structural part for the accelerator sensor and a piezoelectric material of the structural part for the angular velocity sensor are formed on different surfaces.
1 more element
A method of manufacturing an inertial sensor, comprising:
- (A) preparing a first substrate including a first membrane and a second substrate including a second membrane;
- (B) bonding the first substrate and the second substrate to each other so as to expose the first membrane and the second membrane;
- (C) forming an upper structure of a structural part for an accelerator sensor including a piezoresistor disposed on one surface of an outer side of the second membrane and an electrode connected with the piezoresistor;
- (D) forming an upper structure of a structural part for an angular velocity sensor including a piezoresistor disposed on one surface of an outer side of the first membrane and an electrode connected with the piezoresistor;
- (E) forming an angular velocity mass body contacting the first membrane and a post surrounding the angular velocity mass body, corresponding to the piezoelectric material;
- and
- (F) forming an accelerator mass body contacting the second membrane, a post surrounding the accelerator mass body, and a common post disposed at a center between the angular velocity mass body and the accelerator mass body, corresponding to the piezoresistor.
4 more elements
Dependencies are inferred from the claim text.