Fluid treatment device and method for treating fluid
AssigneeEnplas Corporation
InventorKoichi Ono
Life of this patent
Estimating the term…
Abstract
A fluid treatment device (100) has a first substrate (210), a second substrate (120), and a resin film (130) located between the first substrate (210) and the second substrate (120). On the first substrate (210) are formed a first flow channel (111), a region (214) facing a valve formed at the end of the first flow channel (111), a second flow channel (112), and a barrier wall (215) located between the region (214) facing the valve and the end of the second flow channel (112). On the second substrate (120) is formed a pressure compartment (123). The region (214) facing the valve and the barrier wall (215) face the pressure compartment (123) on opposite sides of a diaphragm (131) of resin film (130).
Claims12
A fluid handling device comprising:
- a first substrate which includes a first channel, a valve body facing area formed at an end on one side of the first channel and having a substantially circular segment-shaped opening, a second channel, and a partition wall formed between the valve body facing area and an end on one side of the second channel;
- a second substrate which includes a third channel and a pressure chamber, the pressure chamber being formed at an end on one side of the third channel and having an opening;
- and
- a resin film which is disposed between the first substrate and the second substrate and includes a substantially spherical cap-shaped diaphragm portion,
- wherein the first substrate and the second substrate are integrated with each other with the resin film in between,
- the diaphragm portion is located between the opening of the valve body facing area, the end on one side of the second channel and the partition wall, and the opening of the pressure chamber,
- a center of a circular arc which is included in an edge of the opening of the valve body facing area and a center of an outer edge of the diaphragm portion coincide with each other when seen in a plan view, and
- the diaphragm portion comes into contact with the partition wall due to pressure in the pressure chamber, whereby fluid flow heading for the second channel from the valve body facing area through a gap between the partition wall and the diaphragm portion is stopped.
A fluid handling device comprising:
- a first substrate which includes a first channel, a valve body facing area formed at an end on one side of the first channel and having a substantially circular opening, a second channel, and a partition wall formed between the valve body facing area and an end on one side of the second channel;
- a second substrate which includes a third channel and a pressure chamber, the pressure chamber being formed at an end on one side of the third channel and having an opening;
- and
- a resin film which is disposed between the first substrate and the second substrate and includes a substantially spherical cap-shaped diaphragm portion,
- wherein the first substrate and the second substrate are integrated with each other with the resin film in between,
- the diaphragm portion is located between the opening of the valve body facing area, the end on one side of the second channel and the partition wall, and the opening of the pressure chamber,
- when seen in a plan view, the diaphragm portion is larger than the opening of the valve body facing area and an edge of the opening of the valve body facing area and an outer edge of the diaphragm portion of the resin film are concentric circles, and
- the diaphragm portion comes into contact with the partition wall due to pressure in the pressure chamber, whereby fluid flow heading for the second channel from the valve body facing area through a gap between the partition wall and the diaphragm portion is stopped.
Dependencies are inferred from the claim text.