Cold trap and mounting structure of cold trap
AssigneeSumitomo Heavy Industries, Ltd.
InventorKen Oikawa
Life of this patent
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Abstract
A cold trap includes a duct, which is for connecting a volume to be evacuated to a vacuum pump, and a cold panel surrounded by the duct. The duct includes an inlet flange at an evacuation target side and an outlet flange at a vacuum pump side. The outlet flange is arranged at a distance from the inlet flange in the extending direction of the duct. The inlet flange has an outer diameter larger than an outer diameter of the outlet flange.
Claims5
A cold trap provided between a volume to be evacuated and a vacuum pump for evacuation of the volume, the cold trap comprising:
- a duct configured to connect the volume to the vacuum pump;
- and
- a cold panel surrounded by the duct, wherein
- the duct comprises an inlet flange arranged toward the volume to be evacuated and an outlet flange arranged toward the vacuum pump, the outlet flange is arranged at a distance from the inlet flange in an extending direction of the duct, and
- the inlet flange has an outer diameter larger than an outer diameter of the outlet flange.
Amounting structure of a cold trap, the mounting structure comprising:
- a duct extending from an evacuation target side to a vacuum pump side;
- an inlet flange provided on the duct at the evacuation target side;
- and
- an outlet flange provided on the duct at the vacuum pump side, wherein
- the inlet flange has an outer diameter larger than an outer diameter of the outlet flange.
Dependencies are inferred from the claim text.