Coatings for relatively movable surfaces
AssigneeTexas Instruments Incorporated
InventorsWilliam Robert MORRISON, Mark Christopher FISHER, Murali Hanabe, Ganapathy Subramaniam SIVAKUMAR, Simon Joshua JACOBS
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Abstract
A device comprises a MEMS component comprising at least one surface and a coating disposed on at least a portion of the surface. The coating comprises a compound of the formula M(CnF2n+1Or), wherein M comprises a polar head group, and wherein n≧2r. The value of n may range from 2 to about 20, and the value of r may range from 1 to about 10. The value of n plus r may range from 3 to about 30, and a ratio of n:r may have a value of about 2:1 to about 20:1.
Claims34
A device comprising:
- a MEMS component comprising a surface;
- and
- a coating disposed on at least a portion of the surface, wherein the coating comprises a compound of the formula M(CnF2n+1Or), wherein M comprises a polar head group, and wherein n≧2r.
A device comprising:
- a MEMS component or semiconductor component comprising a surface;
- and
- a coating disposed on the surface, wherein the coating comprises a compound comprising a hydrophilic head group bound to a hydrophobic tail, wherein the hydrophobic tail comprises a fluorinated carbon chain and at least one ether functional group disposed within the fluorinated carbon chain.
A method of protecting a device, the method comprising:
- receiving a MEMS component or semiconductor component;
- and
- disposing a coating on a surface of the MEMS component or semiconductor component, wherein the coating comprises an amphiphilic compound comprising a hydrophilic head group bound to a hydrophobic tail, wherein the hydrophobic tail comprises a fluorinated carbon chain and at least one ether functional group disposed within the fluorinated carbon chain.
Dependencies are inferred from the claim text.