# US 2014/0156070 A1 · Vibration-controlled substrate handling robots, systems, and methods > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2014/0156070 A1 - Document ID: US20140156070A1 - Status: Published application - Kind: A1 - Application number: 14/085,462 - Filed: 2013-11-20 - Published: 2014-06-05 - Earliest claimed: 2012-11-30 - Assignees: Applied Materials, Inc. - Applicants: Applied Materials, Inc. - Inventors: Nir Merry; Alex Minkovich; Jeffrey C. Hudgens; Brendan Till - Web page: https://patentgrep.com/patent/US20140156070A1 ## CPC - B25J 9/1653: {parameters identification, estimation, stiffness, accuracy, error analysis} - B25J: MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES ({manipulators specially adapted for use in surgery A61B34/70; manipulators used in cleaning hollow articles B08B9/04}; manipulators associated with rolling mills B21B39/20; manipulators associated with forging machines B21J13/10; {manipulators associated with picking-up and placing mechanisms B23P19/007}; means for holding wheels or parts thereof B60B30/00; {vehicles with ground-engaging propulsion means, e.g. walking members B62D57/02, B62D57/032; devices for picking-up and depositing articles or materials between conveyors B65G47/90, B65G47/91; manipulators with gripping or holding means for transferring packages B65H67/065}; cranes B66C; {manipulators used in the protection or supervision of pipe-line installations F17D5/00; walking equipment adapted for nuclear steam-generators F22B37/006}; manipulators specially adapted for, or associated with, nuclear reactors G21C; {apparatus used for handling wafers during manufacture or treatment of semiconductor H10P72/50}) ## Abstract Embodiments disclose a vibration-controlled robot apparatus. The apparatus includes a robot having an end effector operable to transport a substrate, a sensor coupled to the robot, the sensor operable to sense vibration as the robot transports the substrate, and operating the robot to reduce vibration of the end effector supporting the substrate. In some embodiments, a filter is provided in the motor drive circuit to filter one or more frequencies causing unwanted vibration of the end effector. Vibration control systems and methods of operating the same are provided, as are other aspects. ## Claims ### Claim 1 A vibration-controlled robot apparatus, comprising: a robot having an end effector operable to transport a substrate; a sensor coupled to the robot, the sensor operable to sense vibration as the robot transports the substrate; and reducing vibration of the robot based upon data measured by the sensor. ### Claim 2 (depends on 1) The vibration-controlled robot apparatus of claim 1 wherein the sensor is a micro-electromechanical system (MEMS) accelerometer. ### Claim 3 (depends on 2) The vibration-controlled robot apparatus of claim 2 wherein the MEMS accelerometer is mounted to the robot via at least one of a magnet, an adhesive, and a mounting stud. ### Claim 4 (depends on 1) The vibration-controlled robot apparatus of claim 1 comprising a filter operable to the filter certain input frequencies to the robot. ### Claim 5 (depends on 4) The vibration-controlled robot apparatus of claim 4 wherein the filter comprises a notch filter that is operational to reduce vibration by preventing vibration at a pre-set frequency from being communicated to the substrate. ### Claim 6 (depends on 4) The vibration-controlled robot apparatus of claim 4 wherein the total permissible vibration is less than 0.1 g of acceleration. ### Claim 7 (depends on 1) The vibration-controlled robot apparatus of claim 1 further comprising a vibration controller operable to receive a first signal from the sensor indicative of the vibration. ### Claim 8 (depends on 7) The vibration-controlled robot apparatus of claim 7 wherein the vibration controller comprises logic to correlate sensed vibration with particular motions of the robot. ### Claim 9 (depends on 8) The vibration-controlled robot apparatus of claim 8 wherein the logic compares the first signal to a database to determine expected vibration. ### Claim 10 (depends on 9) The vibration-controlled robot apparatus of claim 9 wherein the logic compares the first signal to a database to determine whether the acceleration of an end effector of the robot is undesirable. ### Claim 11 A robot vibration reduction method, comprising: supporting a substrate with an end effector of a robot; providing a sensor coupled to the robot; detecting a vibration of the robot with the sensor as the robot transports the substrate; determining one or more conditions under which an undesirable amount of vibration occurs; and minimizing at least some of the vibration of the end effector of the robot. ### Claim 12 (depends on 11) The method of claim 11, wherein minimizing at least some of the vibration of the robot comprises: applying a filter to a motor drive circuit cut out one or more frequency at which the undesirable amount of vibration occurs. ### Claim 13 (depends on 12) The method of claim 12 wherein the filter is a notch filter. ### Claim 14 (depends on 11) The method of claim 11, wherein minimizing at least some of the vibration of the robot comprises: preventing the robot from operating at the frequency at which the undesirable amount of vibration occurs. ### Claim 15 (depends on 11) The method of claim 11 wherein determining a frequency at which an undesirable amount of vibration occurs comprises: artificially inducing external vibration with a vibrating mass. ### Claim 16 A vibration-controlled substrate transport system, comprising: a chamber; a robot received in the chamber, the robot having an end effector operable to transport a substrate; and a sensor coupled to the robot, the sensor operable to detect a vibration of the robot as the robot supports the substrate. ### Claim 17 (depends on 16) The system of claim 16 wherein the sensor is a micro-electromechanical system (MEMS) accelerometer. ### Claim 18 (depends on 16) The system of claim 16, comprising a drive circuit for a drive motor, the drive circuit having a filter operable to reduce vibration of the end effector. ### Claim 19 (depends on 18) The system of claim 18 wherein the filter is a notch filter. ### Claim 20 (depends on 18) The system of claim 18 wherein the filter reduces vibration at the end effector by preventing vibration at a pre-set frequency from being communicated to the end effector.