# US 2014/0155310 A1 · Dynamic multi-purpose composition for the removal of photoresists and method for its use > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2014/0155310 A1 - Document ID: US20140155310A1 - Status: Published application - Kind: A1 - Application number: 14/174,261 - Filed: 2014-02-06 - Published: 2014-06-05 - Earliest claimed: 2005-10-28 - Assignees: Dynaloy, LLC - Applicants: Dynaloy, LLC - Inventors: Michael Tod Phenis; Lauri Johnson; Raymond Chan; Diane Marie Scheele; Kimberly Dona Pollard - Web page: https://patentgrep.com/patent/US20140155310A1 ## CPC - G03F 7/426: {containing organic halogen compounds; containing organic sulfonic acids or salts thereof; containing sulfoxides} - C11D 7/3209: {Amines or imines with one to four nitrogen atoms; Quaternized amines} - C11D 7/3218: {Alkanolamines or alkanolimines} - C11D 7/5009: {containing phosphorus, sulfur or silicon, e.g. dimethylsulfoxide} - G03F 7/425: {containing mineral alkaline compounds; containing organic basic compounds, e.g. quaternary ammonium compounds; containing heterocyclic basic compounds containing nitrogen} - C11D 2111/22: Electronic devices, e.g. PCBs or semiconductors - G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G) - C11D: DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL ## Abstract The disclosure is directed solutions and processes to remove substances from substrates. The substances can include photoresist. The solutions can include dimethylsulfoxide, a quaternary ammonium hydroxide, an alkanolamine, and less than 3% by weight water of a total weight of the solution. The quaternary ammonium hydroxide can include tetramethylammonium hydroxide, dimethyldipropylammonium hydroxide, or methyltriethylammonium hydroxide. Additionally, the solutions can include a secondary solvent. For example, the secondary solvent can include an alcohol. In another example, the secondary solvent can include ethylene glycol. Methods for the preparation and use of the solution to remove substances from substrates are also described. ## Claims ### Claim 1 A solution comprising: dimethylsulfoxide; a quaternary ammonium hydroxide; an alkanolamine having at least two carbon atoms and including at least one amino substituent and at least one hydroxyl substituent, and the amino substituent and the at least one hydroxyl substituent are attached to different carbon atoms of the alkanolamine; less than 3% by weight water for a total weight of the solution; and a secondary solvent comprising an alcohol, a polyhydroxyl compound, or a combination thereof, and optionally a glycol ether compound, wherein the alcohol and polyhydroxyl compound do not contain an ether, amine, or ester linkages. ### Claim 2 (depends on 1) The solution of claim 1, wherein the quaternary ammonium hydroxide includes an alkyl ammonium hydroxide. ### Claim 3 (depends on 2) The solution of claim 2, wherein the alkyl ammonium hydroxide includes tetramethylammonium hydroxide, dimethyldipropylammonium hydroxide, or methyltriethylammonium hydroxide. ### Claim 4 (depends on 1) The solution of claim 1, wherein the secondary solvent comprises a polyhydroxyl compound, and wherein the polyhydroxyl compound comprises propylene glycol. ### Claim 5 (depends on 1) The solution of claim 1, comprising a polyhydroxyl compound, wherein an amount of the polyhydroxyl compound is in a range of about 5% by weight to about 20% by weight of a total weight of the solution. ### Claim 6 (depends on 1) The solution of claim 1, wherein the solution further comprises a glycol ether. ### Claim 7 (depends on 1) The solution of claim 1, wherein the secondary solvent further comprises a glycol ether compound. ### Claim 8 A solution comprising dimethylsulfoxide; a quaternary ammonium hydroxide including tetramethylammonium hydroxide, dimethyldipropylammonium hydroxide, or methyltriethylammonium hydroxide, benzyltrimethylammonium hydroxide, diethyldimethylammonium hydroxide; an alkanolamine having at least two carbon atoms, at least one amino substituent, and at least one hydroxyl substituent, the at least one amino substituent and the at least one hydroxyl substituent being attached to different carbon atoms of the alkanolamine; less than 3% by weight water of a total weight of the solution; and a secondary solvent comprising an alcohol, a polyhydroxyl compound, or a combination thereof, and optionally a glycol ether compound, wherein the alcohol and polyhydroxyl compound do not contain an ether, amine, or ester linkages. polyhydroxyl compound. ### Claim 9 (depends on 8) The solution of claim 8, wherein: an amount of the alkanolamine is included in a range of about 3% by weight to about 15% by weight of a total weight of the solution; and the alkanolamine comprises monoethanolamine. ### Claim 10 (depends on 8) The solution of claim 8, wherein the secondary solvent comprises an alcohol, said alcohol comprising one or more of furfurylalcohol, tetrahydrofurfuryl alcohol, tert-butyl alcohol, and 3-methyl-3-pentanol. ### Claim 11 (depends on 8) The solution of claim 8, wherein the secondary solvent comprises a polyhydroxyl compound, said polyhydroxyl compound comprising ethylene glycol, 1,2-propanediol, 1,3-propanediol, 1,4-pentanediol, 1,2-butanediol, or 1,3-butanediol. ### Claim 12 (depends on 8) The solution of claim 8, wherein an amount of the dimethylsulfoxide is included in a range of about 70% by weight to about 90% by weight of a total weight of the solution. ### Claim 13 (depends on 8) The solution of claim 8, wherein an amount of the quaternary ammonium hydroxide is included in a range of about 1% by weight to about 7% by weight of a total weight of the solution. ### Claim 14 A solution comprising: dimethylsulfoxide; dimethyldipropylammonium hydroxide; less than 3% by weight water for a total weight of the solution; and an alkanolamine. ### Claim 15 (depends on 14) The solution of claim 14, further comprising an amount of secondary solvent included in a range of about 2% by weight to about 35% by weight of a total weight of the solution. ### Claim 16 (depends on 15) The solution of claim 15, wherein the secondary solvent comprises a glycol ether. ### Claim 17 (depends on 15) The solution of claim 15, wherein the secondary solvent comprises a polyhydroxyl compound that does not contain an ether, amine, or ester linkage. ### Claim 18 (depends on 14) The solution of claim 14, further comprising an amount of a corrosion inhibitor included in a range of about 1 ppm to about 10% by weight of the total weight of the solution. ### Claim 19 (depends on 14) The solution of claim 14, wherein: an amount of the dimethylsulfoxide is included in a range of about 55% by weight to about 95% by weight of a total weight of the solution; an amount of the dimethyldipropylammonium hydroxide is included in a range of about 2% by weight to about 10% by weight of a total weight of the solution; and an amount of the alkanolamine is included in a range of about 2% by weight to about 75% by weight of a total weight of the solution. ### Claim 20 (depends on 14) The solution of claim 14, comprising a secondary solvent comprising an alcohol, a polyhydroxyl compound, or a combination thereof, and optionally a glycol ether compound, wherein the alcohol and polyhydroxyl compound do not contain an ether, amine, or ester linkages. wherein the alkanolamine has at least two carbon atoms, at least one amino substituent, and at least one hydroxyl substituent, the at least one amino substituent and the at least one hydroxyl substituent being attached to different carbon atoms of the alkanolamine.