# US 2014/0155251 A1 · Substrate for carbon nanotube growth and method for manufacturing the same > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2014/0155251 A1 - Document ID: US20140155251A1 - Status: Published application - Kind: A1 - Application number: 14/095,447 - Filed: 2013-12-03 - Published: 2014-06-05 - Earliest claimed: 2012-12-04 - Assignees: Honda Motor Co., Ltd. - Applicants: Honda Motor Co., Ltd. - Inventors: Toshiyuki Ohashi; Toshio Tokune; Masahiro Ohta; Ryogo Kato; Toshiyuki Shima - Web page: https://patentgrep.com/patent/US20140155251A1 ## CPC - B01J 23/78: with alkali- or alkaline earth metals - B01J 23/745: Iron - B01J 37/0244: {Coatings comprising several layers} - B01J 37/342: {of electric, magnetic or electromagnetic fields, e.g. for magnetic separation} - B82Y 30/00: Nanotechnology for materials or surface science, e.g. nanocomposites - B82Y 40/00: Manufacture or treatment of nanostructures - C23C 14/5893: {Mixing of deposited material} - C23C 14/081: {of aluminium, magnesium or beryllium} - C23C 14/18: on other inorganic substrates - C23C 14/5853: {Oxidation} - B01J: CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS - B82Y: SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES - C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04) ## Abstract Provided is a substrate for carbon nanotube growth in which no metal particles as a catalyst aggregates and a method for manufacturing the substrate. A substrate for carbon nanotube growth 1 includes a base plate 2, a catalyst 3, a form-defining material layer 4 which allows the catalyst 3 to be dispersed and arranged, and a covering layer 5 which has a metal oxide to cover the catalyst. A method for manufacturing a substrate for carbon nanotube growth 1 includes a step of sputtering on a base plate 2 a metal which forms a catalyst 3 and oxidizing the surface of the metal, a step of sputtering a form-defining material on the base plate 2, and a step of further sputtering on the form-defining material a metal which forms a catalyst 3 and oxidizing the surface of the metal. ## Claims ### Claim 1 A substrate for carbon nanotube growth comprising a base plate and a catalyst disposed on the base plate, the substrate comprising: a catalyst consisting of a transition metal; a form-defining material layer which is formed on the base plate to define a form which allows the catalyst to be dispersed and arranged; and a covering layer which consists of a metal oxide to cover the surface of the catalyst. ### Claim 2 (depends on 1) The substrate for carbon nanotube growth according to claim 1, wherein the form-defining material layer controls a plane direction of the crystal structure of the catalyst to thereby define the form of the catalyst. ### Claim 3 (depends on 1) The substrate for carbon nanotube growth according to claim 1, wherein the catalyst consists of an iron group element. ### Claim 4 (depends on 3) The substrate for carbon nanotube growth according to claim 3, wherein the iron group element is Fe. ### Claim 5 (depends on 1) The substrate for carbon nanotube growth according to claim 1, wherein the base plate consists of MgO (100) single crystal. ### Claim 6 (depends on 1) The substrate for carbon nanotube growth according to claim 1, wherein the form-defining material layer has the same material as the base plate. ### Claim 7 (depends on 1) The substrate for carbon nanotube growth according to claim 1, wherein the base plate consists of MgO (100) single crystal, and the form-defining material layer consists of MgO which is the same material as the base plate in terms of substance. ### Claim 8 (depends on 1) The substrate for carbon nanotube growth according to claim 1, wherein the covering layer consists of MgFe2O4. ### Claim 9 (depends on 1) The substrate for carbon nanotube growth according to claim 1, wherein the covering layer has a thickness ranging from 0.2 to 5.0 nm. ### Claim 10 A method for manufacturing a substrate for carbon nanotube growth comprising a base plate and a catalyst disposed on the base plate, the method comprising: a step of sputtering on the base plate a metal which forms the catalyst and oxidizing the surface of the metal; a step of sputtering on the base plate a form-defining material which defines a form which allows the catalyst to be dispersed and arranged; and a step of further sputtering on the form-defining material a metal which forms the catalyst and oxidizing the surface of the metal. ### Claim 11 (depends on 10) The method for manufacturing a substrate for carbon nanotube growth according to claim 10, wherein the step of sputtering a form-defining material which defines a form which allows the catalyst to be dispersed and arranged, and the step of further sputtering on the form-defining material a metal which forms the catalyst and oxidizing the surface of the metal are repeated in a plurality of times. ### Claim 12 (depends on 10) The method for manufacturing a substrate for carbon nanotube growth according to claim 10, wherein the metal which forms the catalyst consists of a transition metal. ### Claim 13 (depends on 10) The method for manufacturing a substrate for carbon nanotube growth according to claim 10, wherein the metal which forms the catalyst consists of an iron group element. ### Claim 14 (depends on 10) The method for manufacturing a substrate for carbon nanotube growth according to claim 10, wherein the iron group element is Fe. ### Claim 15 (depends on 10) The method for manufacturing a substrate for carbon nanotube growth according to claim 10, wherein the base plate consists of MgO (100) single crystal. ### Claim 16 (depends on 10) The method for manufacturing a substrate for carbon nanotube growth according to claim 10, wherein the form-defining material is the same material as the base plate. ### Claim 17 (depends on 10) The method for manufacturing a substrate for carbon nanotube growth according to claim 10, wherein the form-defining material is MgO.