# US 2014/0155250 A1 · Substrate for carbon nanotube growth and method for manufacturing the same

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- Number: US 2014/0155250 A1
- Document ID: US20140155250A1
- Status: Published application
- Kind: A1
- Application number: 14/095,426
- Filed: 2013-12-03
- Published: 2014-06-05
- Earliest claimed: 2012-12-04
- Assignees: Honda Motor Co., Ltd.
- Applicants: Honda Motor Co., Ltd.
- Inventors: Toshiyuki Ohashi; Toshio Tokune; Masahiro Ohta; Ryogo Kato; Toshiyuki Shima
- Web page: https://patentgrep.com/patent/US20140155250A1

## CPC

- B01J 23/8906: {Iron and noble metals}
- C01B 32/162: characterised by catalysts
- B82Y 30/00: Nanotechnology for materials or surface science, e.g. nanocomposites
- B82Y 40/00: Manufacture or treatment of nanostructures
- B01J: CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- C01B: NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; {METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C}
- B82Y: SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES

## Abstract

Provided is a substrate for carbon nanotube growth in which no metal particles as a catalyst aggregates and a method for manufacturing the substrate. A substrate for carbon nanotube growth 1 includes a base plate 2, a noble metal alloy catalyst 3 having an alloy of a noble metal and a transition metal, and a form-defining material layer 4 which allows the noble metal alloy catalyst 3 to be dispersed and arranged. A method for manufacturing a substrate for carbon nanotube growth 1 includes a step of sputtering a noble metal alloy on a base plate 2, a step of sputtering a form-defining material on the base plate 2, and a step of further sputtering the noble metal alloy on the form-defining material.

## Claims

### Claim 1

A substrate for carbon nanotube growth comprising a base plate and a catalyst disposed on the base plate, the substrate comprising:
a noble metal alloy catalyst consisting of an alloy of a noble metal and a transition metal; and
a form-defining material layer which is formed on the base plate to define a form which allows the noble metal alloy catalyst to be dispersed and arranged.

### Claim 2 (depends on 1)

The substrate for carbon nanotube growth according to claim 1, wherein the form-defining material layer controls a plane direction of the crystal structure of the noble metal alloy catalyst to thereby define the form of the noble metal alloy catalyst.

### Claim 3 (depends on 1)

The substrate for carbon nanotube growth according to claim 1, wherein the noble metal alloy catalyst consists of FexPt1-x (0.3≦x≦0.7).

### Claim 4 (depends on 3)

The substrate for carbon nanotube growth according to claim 3, wherein the noble metal alloy catalyst consists of FexPt1-x (0.3≦x≦0.6).

### Claim 5 (depends on 4)

The substrate for carbon nanotube growth according to claim 4, wherein the noble metal alloy catalyst consists of FexPt1-x (0.3≦x≦0.37).

### Claim 6 (depends on 1)

The substrate for carbon nanotube growth according to claim 1, wherein the base plate consists of MgO (100) single crystal.

### Claim 7 (depends on 1)

The substrate for carbon nanotube growth according to claim 1, wherein the form-defining material layer consists of the same material as the base plate.

### Claim 8 (depends on 1)

The substrate for carbon nanotube growth according to claim 1, wherein the base plate consists of MgO (100) single crystal, and the form-defining material layer consists of MgO which is the same material as the base plate in terms of substance.

### Claim 9

A method for manufacturing a substrate for carbon nanotube growth comprising a base plate and a catalyst disposed on the base plate, the method comprising:
a step of sputtering on the base plate a noble metal alloy consisting of a noble metal and a transition metal;
a step of sputtering on the base plate a form-defining material which defines a form which allows a catalyst having the noble metal alloy to be dispersed and arranged; and
a step of further sputtering the noble metal alloy on the form-defining material.

### Claim 10 (depends on 9)

The method for manufacturing a substrate for carbon nanotube growth according to claim 9, wherein the step of sputtering on the base plate a form-defining material which defines a form which allows a catalyst having the noble metal alloy to be dispersed and arranged and the step of further sputtering the noble metal alloy on the form-defining material are repeated in a plurality of times.

### Claim 11 (depends on 9)

The method for manufacturing a substrate for carbon nanotube growth according to claim 9, wherein the noble metal alloy consists of FexPt1-x (0.3≦x≦0.7).

### Claim 12 (depends on 11)

The method for manufacturing a substrate for carbon nanotube growth according to claim 11, wherein the noble metal alloy consists of FexPt1-x (0.3≦x≦0.6).

### Claim 13 (depends on 12)

The method for manufacturing a substrate for carbon nanotube growth according to claim 12, wherein the noble metal alloy consists of FexPt1-x (0.3≦x≦0.37).

### Claim 14 (depends on 9)

The method for manufacturing a substrate for carbon nanotube growth according to claim 9, wherein the base plate consists of MgO (100) single crystal.

### Claim 15 (depends on 9)

The method for manufacturing a substrate for carbon nanotube growth according to claim 9, wherein the form-defining material layer consists of the same material as the base plate.

### Claim 16 (depends on 9)

The method for manufacturing a substrate for carbon nanotube growth according to claim 9, wherein the base plate consists of MgO (100) single crystal, and the form-defining material layer consists of MgO which is the same material as the base plate in terms of substance.