# US 2014/0154825 A1 · Method of manufacturing mask substrate and method of manufacturing organic electroluminescent display using the same > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2014/0154825 A1 - Document ID: US20140154825A1 - Status: Published application - Kind: A1 - Application number: 13/961,866 - Filed: 2013-08-07 - Published: 2014-06-05 - Earliest claimed: 2012-12-03 - Assignees: Samsung Display Co., Ltd. - Inventors: Hyo Yeon Kim; Ha-Jin Song; Sang-Woo Lee; Hye-Yeon Shim; Heun-Seung Lee; Kyul Han; Sang-Woo Pyo - Web page: https://patentgrep.com/patent/US20140154825A1 ## CPC - H10K 59/10: OLED displays - H10K 71/166: {using selective deposition, e.g. using a mask} - H10K: ORGANIC ELECTRIC SOLID-STATE DEVICES ## Abstract A first conductive member is positioned on a base substrate. A second conductive member is positioned on the first conductive member, the second conductive member being electrically coupled to the first conductive member, and having a resistivity higher than that of the first conductive member. A mask substrate is positioned on the second conductive member. A portion of the mask substrate that contacts the second conductive member is removed . ## Claims ### Claim 1 A method of manufacturing a mask substrate, comprising: positioning a first conductive member on a base substrate; positioning a second conductive member on the first conductive member, the second conductive member being electrically coupled to the first conductive member, and having a resistivity higher than that of the first conductive member; positioning a mask substrate on the second conductive member; and removing a portion of the mask substrate that contacts the second conductive member. ### Claim 2 (depends on 1) The method of claim 1, wherein the mask substrate has a film shape. ### Claim 3 (depends on 2) The method of claim 2, wherein the mask substrate comprises a polymer material. ### Claim 4 (depends on 1) The method of claim 1, wherein removing the portion of the mask substrate comprises transmitting a current to the second conductive member through the first conductive member to generate heat from the second conductive member. ### Claim 5 (depends on 4) The method of claim 4, wherein the portion of the mask substrate that contacts the second conductive member is burned and removed by the heat. ### Claim 6 (depends on 4) The method of claim 4, wherein the heat is a joule heat generated from the second conductive member by the current. ### Claim 7 (depends on 1) The method of claim 1, wherein the first conductive member comprises a plurality of first conductive members formed as adjacent lines extending across the base substrate, and the second conductive member comprises a plurality of second conductive members arranged on the first conductive members. ### Claim 8 (depends on 7) The method of claim 7, wherein the first conductive members are spaced apart from each other and the second conductive members are spaced apart from each other. ### Claim 9 (depends on 1) The method of claim 1, further comprising removing the base substrate and the first and second conductive members from the mask substrate after removing the portion of the mask substrate. ### Claim 10 A method of manufacturing an organic electroluminescent display, comprising: positioning a first conductive member on a base substrate; positioning a second conductive member on the first conductive member, the second conductive member being electrically coupled to the first conductive member, and having a resistivity higher than that of the first conductive member; positioning a mask substrate on the second conductive member; removing a portion of the mask substrate that contacts the second conductive member to form a mask hole by transmitting a current to the second conductive member through the first conductive member to generate heat from the second conductive member; positioning an array substrate on the mask substrate; removing the base substrate and the first and second conductive members from the array substrate and the mask substrate to expose a portion of the array substrate through the mask hole; and forming an organic light emitting layer on the exposed portion of the array substrate. ### Claim 11 (depends on 10) The method of claim 10, wherein the mask substrate has a film shape. ### Claim 12 (depends on 11) The method of claim 11, wherein the mask substrate comprises a polymer material. ### Claim 13 (depends on 10) The method of claim 10, wherein the portion of the mask substrate that contacts the second conductive member is burned and removed by the heat. ### Claim 14 (depends on 10) The method of claim 10, wherein the heat is a joule heat generated from the second conductive member by the current. ### Claim 15 (depends on 10) The method of claim 10, wherein the first conductive member comprises a plurality of first conductive members formed as adjacent lines extending across the base substrate, and the second conductive member comprises a plurality of second conductive members arranged on the first conductive members. ### Claim 16 (depends on 15) The method of claim 15, wherein the first conductive members are spaced apart from each other and the second conductive members are spaced apart from each other. ### Claim 17 (depends on 16) The method of claim 16, wherein the array substrate comprises a plurality of pixel areas, and the pixel areas are exposed through the removed portion of the mask substrate. ### Claim 18 (depends on 10) The method of claim 10, wherein the array substrate comprises a plurality of pixel areas, and the pixel areas are exposed through the mask hole. ### Claim 19 (depends on 10) The method of claim 10, wherein the forming of the organic light emitting layer on the exposed portion of the array substrate comprises: depositing a preliminary organic light emitting layer on the mask substrate and the array substrate; and removing the mask substrate and a portion of the preliminary organic light emitting layer on the mask substrate from the array substrate to form the organic light emitting layer. ### Claim 20 (depends on 10) The method of claim 10, further comprising: forming a common electrode on the organic light emitting layer after the organic light emitting layer is formed on the array substrate; and coupling a sealant substrate with the array substrate, wherein a pixel electrode is formed on the array substrate, and the pixel electrode of the array substrate is exposed through the mask hole prior to forming the organic light emitting layer on the array substrate.