# US 2014/0154785 A1 · Method for making polymer single nanowires and sensors utilizing the same

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- Number: US 2014/0154785 A1
- Document ID: US20140154785A1
- Status: Published application
- Kind: A1
- Application number: 13/901,532
- Filed: 2013-05-23
- Published: 2014-06-05
- Earliest claimed: 2012-05-23
- Assignees: University of Pittsburgh—Of the Commonwealth System of Higher Education
- Inventors: Minhee Yun; David Schwartzman; Jiyong Huang
- Web page: https://patentgrep.com/patent/US20140154785A1

## CPC

- G01N 27/4145: {specially adapted for biomolecules, e.g. gate electrode with immobilised receptors}
- G01N 27/4146: {involving nanosized elements, e.g. nanotubes, nanowires}
- G01N 33/54366: {Apparatus specially adapted for solid-phase testing}
- G01N 33/54373: {involving physiochemical end-point determination, e.g. wave-guides, FETS, gratings}
- G01N 33/5438: {Electrodes}
- G01N 33/552: Glass or silica
- B82Y 15/00: Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
- Y10S 977/762: Nanowire or quantum wire, i.e. axially elongated structure having two dimensions of 100 nm or less
- G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q)
- B82Y: SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- Y10S: TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS

## Abstract

A method of fabricating polymer single nanowires, comprising the steps of: spin coating a polymethylmethacrylate resist onto a silicon wafer patterned with at least one gold electrode pair; creating a nanochannel using e-beam lithography between each pair of the at least one gold electrode pairs; placing the silicon wafer into an aniline monomer polymerization solution; reacting the polymerization solution to give a coated wafer and a polyaniline film; and cleaning the coated wafer of polymethylmethacrylate resist and polyaniline film to give at least one gold electrode pair with a connecting polymer single nanowire.

## Claims

### Claim 1

A method of fabricating polymer single nanowires, comprising the steps of:
spin coating a polymethylmethacrylate resist onto a silicon wafer patterned with at least one gold electrode pair;
creating a nanochannel using e-beam lithography between each pair of the at least one gold electrode pairs;
placing the silicon wafer into an aniline monomer polymerization solution;
reacting the polymerization solution to give a coated wafer and a polyaniline film; and
cleaning the coated wafer of polymethylmethacrylate resist and polyaniline film to give at least one gold electrode pair with a connecting polymer single nanowire.

### Claim 2 (depends on 1)

The method of claim 1, wherein there is a plurality of gold electrode pairs on the silicon wafer, and each of the polymer single nanowires has a uniform diameter.

### Claim 3 (depends on 1)

The method of claim 1, wherein each polymer single nanowire has a diameter of about 100 nanometers and a length of about 8 micrometers.

### Claim 4

A polymer single nanowire having a plurality of polymer nanofibers whereby the surface to volume ratio is elevated.

### Claim 5 (depends on 4)

The polymer single nanowire of claim 4 wherein the polymer single nanowire comprises polyaniline.

### Claim 6

A method of functionalizing polymer single nanowires to enable detection of a biomarker for a certain disease comprising the steps of:
incubating an aqueous mixture of 1-ethyl-3-(3-dimethylaminopropyl) carbodiimide), N-hydroxysuccinimide, and a biomarker on a polymer single nanowire that connects a pair of gold electrodes on a silicon wafer;
rinsing the polymer single nanowire; and
soaking the polymer single nanowire in an aqueous solution of bovine serum albumin.

### Claim 7 (depends on 6)

The method of claim 6 wherein the biomarker is selected from the group consisting of B-type natriuretic peptide, myoglobin (Myo), cardiac troponin (cTpI), and creatine kinase (CK-MB).

### Claim 8

A method of manufacturing microfluidic sensors using functionalized polymer single nanowires, comprising the steps of:
covalently bonding a biomarker to each of a plurality of polymer single nanowires, wherein each polymer single nanowire connects two gold electrodes on a silicon wafer to give a plurality of prefunctionalized biosensors; and
integrating polydimethylsiloxane with each of the plurality of prefunctionalized biosensors using oxygen plasma treatment to give a plurality of microfluidic sensors.

### Claim 9 (depends on 8)

The method of claim 8, further comprising the step of shielding each of the plurality of functionalized polymer single nanowires during oxygen plasma treatment.

### Claim 10 (depends on 9)

The method of claim 9, wherein the shielding comprises a shadow mask.

### Claim 11 (depends on 9)

The method of claim 9, wherein the shielding comprises a shadow mask of an aluminum substrate.

### Claim 12 (depends on 8)

The method of claim 8 wherein the silicon wafer has at least sixteen pairs of gold electrodes thereon.

### Claim 13

A biosensor comprising a microfluidic biosensor having an ion-sensitive field-effect transistor.

### Claim 14 (depends on 13)

The biosensor of claim 13, wherein the transistor comprises a biomarker functionalized polymer single nanowire.

### Claim 15 (depends on 14)

The biosensor of claim 14, wherein the functionalized polymer single nanowire comprises polyaniline.

### Claim 16

A method of biasing a microfluidic biosensor to maximize sensitivity to a biomarker, the method comprising the steps of:
covalently bonding the biomarker to a polymer single nanowire connecting two electrodes on a silicon wafer to give a prefunctionalized biosensor;
integrating polydimethylsiloxane with the prefunctionalized biosensor to give a microfluidic device;
coupling a gate electrode to the polymer single nanowire, wherein a solution in communication with the gate electrode and polymer single nanowire serves as a liquid electrolyte gate; and
tuning a gate voltage applied to the gate electrode.

### Claim 17

A biomarker detection device comprising:
a microfluidic biosensor further comprising a biomarker functionalized polymer single nanowire connecting a pair of gold electrodes on a silicon wafer;
the polymer single nanowire coupled to a gate electrode by a liquid electrolyte gate;
a tunable gate voltage connected to the gate electrode; and
software configured to receive input of the conductivity/resistivity of the polymer single nanowire and report a response for results of the conductivity/resistivity of the polymer single nanowire.

### Claim 18 (depends on 17)

The biomarker detection device of claim 17, wherein the reported response is outside a predetermined level.

### Claim 19 (depends on 17)

The biomarker detection device of claim 17, wherein the biomarker is selected from the group consisting of B-type natriuretic peptide, myoglobin (Myo), cardiac troponin (cTpI), and creatine kinase (CK-MB).

### Claim 20 (depends on 17)

The biomarker detection device of claim 17, further comprising a wireless communication component.
