# US 2014/0154628 A1 · Photosensitive resin composition, photosensitive film, permanent resist and method for producing permanent resist

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- Number: US 2014/0154628 A1
- Document ID: US20140154628A1
- Status: Published application
- Kind: A1
- Application number: 14/237,618
- Filed: 2012-08-09
- Published: 2014-06-05
- Earliest claimed: 2011-08-10
- Assignees: Hitachi Chemical Company, Ltd.
- Inventors: Toshimasa Nagoshi; Shigeo Tanaka
- Web page: https://patentgrep.com/patent/US20140154628A1

## CPC

- G03F 7/0388: {with ethylenic or acetylenic bands in the side chains of the photopolymer}
- C08G 59/1455: {Monocarboxylic acids, anhydrides, halides, or low-molecular-weight esters thereof}
- C08G 59/186: {with acids}
- C08L 63/00: Compositions of epoxy resins; Compositions of derivatives of epoxy resins
- C08L 63/10: Epoxy resins modified by unsaturated compounds
- G03F 7/0047: {characterised by additives for obtaining a metallic or ceramic pattern, e.g. by firing}
- G03F 7/027: Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds (G03F7/075 takes precedence)
- G03F 7/038: Macromolecular compounds which are rendered insoluble or differentially wettable (G03F7/075 takes precedence; macromolecular azides G03F7/012; macromolecular diazonium compounds G03F7/021)
- G03F 7/0385: {using epoxidised novolak resin}
- H05K 3/287: {Photosensitive compositions}
- H05K 2201/0209: Inorganic, non-metallic particles
- G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G)
- C08G: MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08L: COMPOSITIONS OF MACROMOLECULAR COMPOUNDS (compositions based on polymerisable monomers C08F, C08G; artificial filaments or fibres D01F; textile treating compositions D06)
- H05K: PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS

## Abstract

The present invention provides a photosensitive resin composition comprising an (a) component: an acid-modified epoxy resin, a (b) component: a photopolymerizable monomer having an ethylenically unsaturated group, a (c) component: a photopolymerization initiator, a (d) component: an epoxy resin, and an (e) component: an inorganic filler, wherein the (a) component comprises an acid-modified bisphenol novolak type epoxy resin and further the photosensitive resin composition satisfies a predetermined condition, and provides a photosensitive film, a permanent resist and a method for producing a permanent resist using the same.

## Claims

### Claim 1

A photosensitive resin composition comprising:
an (a) component: an acid-modified epoxy resin;
a (b) component: a photopolymerizable monomer having an ethylenically unsaturated group;
a (c) component: a photopolymerization initiator;
a (d) component: an epoxy resin; and
an (e) component: an inorganic filler,
wherein the (a) component comprises an acid-modified bisphenol novolak type epoxy resin and further the photosensitive resin composition satisfies at least one of the conditions shown in the following (I) and (II):
(I) the (b) component comprises a photopolymerizable monomer having a tricyclodecane structure and a urethane bond; and
(II) the (e) component comprises a silica filler having a maximum particle size of 1 μm or less in an amount of more than 60 parts by mass based on a total of 100 parts by mass of the (a) component and the (b) component.

### Claim 2 (depends on 1)

The photosensitive resin composition according to claim 1, wherein the acid-modified bisphenol novolak type epoxy resin comprises an acid-modified bisphenol novolak type epoxy resin obtained by adding a polybasic acid anhydride to a product obtained by esterifying an epoxy resin having a structure represented by the following formula (1) with an ethylenically unsaturated group-containing monocarboxylic acid,
wherein R1 represents a hydrogen atom or a glycidyl group, R2 represents a hydrogen atom or a methyl group, and n represents 1 or more; in addition, a plurality of R1 and R2 may be the same as or different from each other.

### Claim 3 (depends on 1)

The photosensitive resin composition according to claim 1, wherein the photopolymerizable monomer having a tricyclodecane structure and a urethane bond comprises a photopolymerizable monomer having a partial structure represented by the following formula (2) or the following formula (3),
wherein R3, R4, R5, and R6 represent a direct bond, an alkylene group, or an arylene group.

### Claim 4 (depends on 1)

The photosensitive resin composition according to claim 1, wherein the (b) component comprises a urethane compound obtained by reacting a diol compound having a tricyclodecane structure, a diisocyanate compound, and a compound having an ethylenically unsaturated group and a hydroxyl group.

### Claim 5 (depends on 1)

The photosensitive resin composition according to claim 1, further comprising a curing accelerator having an amino group in the molecule.

### Claim 6 (depends on 1)

A photosensitive film comprising:
a support; and
a photosensitive layer formed on the support, the photosensitive layer comprising the photosensitive resin composition according to claim 1.

### Claim 7 (depends on 1)

A method for producing a permanent resist comprising:
a step of forming a photosensitive layer comprising the photosensitive resin composition according to claim 1 on the substrate;
a step of irradiating the photosensitive layer with an active ray in a pattern; and
a step of developing the photosensitive layer to form a permanent resist.

### Claim 8 (depends on 1)

A permanent resist comprising a cured product of the photosensitive resin composition according to claim 1.

### Claim 9 (depends on 5)

A photosensitive film comprising:
a support; and
a photosensitive layer formed on the support, the photosensitive layer comprising the photosensitive resin composition according to claim 5.

### Claim 10 (depends on 5)

A method for producing a permanent resist comprising:
a step of forming a photosensitive layer comprising the photosensitive resin composition according to claim 5 on the substrate;
a step of irradiating the photosensitive layer with an active ray in a pattern; and
a step of developing the photosensitive layer to form a permanent resist.

### Claim 11 (depends on 5)

A permanent resist comprising a cured product of the photosensitive resin composition according to claim 5.
