# US 2014/0154528 A1 · Low Resistance Area Magnetic Stack

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- Number: US 2014/0154528 A1
- Document ID: US20140154528A1
- Status: Published application
- Kind: A1
- Application number: 13/690,532
- Filed: 2012-11-30
- Published: 2014-06-05
- Earliest claimed: 2012-11-30
- Assignees: Seagate Technology LLC
- Applicants: Seagate Technology LLC
- Inventors: Vijay Karthik Sankar; Mark William Covington
- Web page: https://patentgrep.com/patent/US20140154528A1

## CPC

- G11B 5/313: {Disposition of layers}
- G01R 33/00: Arrangements or instruments for measuring magnetic variables
- G01R 33/093: {using multilayer structures, e.g. giant magnetoresistance sensors (thin magnetic films H01F10/00)}
- G11B 5/3909: {Arrangements using a magnetic tunnel junction}
- G11C 11/16: using elements in which the storage effect is based on magnetic spin effect
- G11C 11/161: {details concerning the memory cell structure, e.g. the layers of the ferromagnetic memory cell}
- H01F 10/32: Spin-exchange-coupled multilayers, e.g. nanostructured superlattices {(applying spin-exchange-coupled multilayers to substrates H01F41/302)}
- H01F 41/307: {insulating or semiconductive spacer}
- H10N 50/01: Manufacture or treatment
- H10N 50/10: Magnetoresistive devices
- H01F 10/3254: {the spacer being semiconducting or insulating, e.g. for spin tunnel junction [STJ]}
- Y10T 428/1114: having tunnel junction effect
- Y10T 428/1143: with defined structural feature
- G11B: INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER (recording measured values in a way that does not require playback through a transducer G01D9/00; recording or playback apparatus using mechanically marked tape, e.g. punched paper tape, or using unit records, e.g. punched or magnetically marked cards G06K; transferring data from one type of record carrier to another G06K1/18; circuits for coupling output of reproducer to radio receiver H04B1/20; gramophone pick-ups or like acoustic electromechanical transducers or circuits therefor H04R)
- G01R: MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES (indicating correct tuning of resonant circuits H03J3/12)
- G11C: STATIC STORES (semiconductor memory devices H10B)
- H01F: MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H10N: ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- Y10T: TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION

## Abstract

A magnetic element may generally be configured at least with a magnetic stack having a multilayer barrier structure disposed between first and second ferromagnetic layers. The multilayer barrier structure can have a binary compound layer disposed between first and second alloy layers with the binary compound having a metal element and a second element where at least one alloy layer has the metal element and a third element dissimilar from the second element.

## Claims

### Claim 1

An apparatus comprising a magnetic stack with a multilayer barrier structure disposed between first and second ferromagnetic layers, the multilayer barrier structure having a binary compound layer disposed between first and second alloy layers, the binary compound comprising a metal element and a second element, at least one alloy layer comprising the metal element and a third element dissimilar from the second element.

### Claim 2 (depends on 1)

The apparatus of claim 1, wherein the metal element comprises Magnesium.

### Claim 3 (depends on 1)

The apparatus of claim 1, wherein the second element comprises Oxygen.

### Claim 4 (depends on 1)

The apparatus of claim 1, wherein the second element comprises Barium.

### Claim 5 (depends on 1)

The apparatus of claim 1, wherein the second element comprises Lithium.

### Claim 6 (depends on 1)

The apparatus of claim 1, wherein the second element comprises Strontium.

### Claim 7 (depends on 1)

The apparatus of claim 1, wherein the magnetic stack comprises a trilayer lamination having first and second magnetically free layers without a fixed reference magnetization.

### Claim 8 (depends on 1)

The apparatus of claim 1, wherein the magnetic stack comprises an abutted junction lamination having a fixed magnetization reference structure opposite the multilayer barrier structure from a magnetically free layer.

### Claim 9 (depends on 1)

The apparatus of claim 1, wherein each alloy layer is disposed between one of the first and second ferromagnetic layers and the binary compound layer.

### Claim 10 (depends on 1)

The apparatus of claim 1, wherein the first and second alloy layers have the same material composition.

### Claim 11 (depends on 1)

The apparatus of claim 1, wherein the binary compound layer and at least one alloy layer each have a common thickness.

### Claim 12 (depends on 1)

The apparatus of claim 1, wherein the binary compound layer and at least one alloy layer each have dissimilar thicknesses.

### Claim 13 (depends on 9)

The apparatus of claim 9, wherein the first and second alloy layers have dissimilar material compositions.

### Claim 14

A magnetic element comprising:
a magnetic stack with a multilayer barrier structure disposed between first and second ferromagnetic layers and between first and second pure metal layers, the multilayer barrier structure having a binary compound layer disposed between first and second alloy layers, the binary compound comprising a metal element and a second element, each alloy layer comprising the metal element and a third element dissimilar from the second element.

### Claim 15 (depends on 14)

The magnetic element of claim 14, wherein each pure metal layer comprises the metal element of the binary compound.

### Claim 16 (depends on 14)

The magnetic element of claim 14, wherein the binary compound layer comprises MgO and each alloy layer comprises MgX where X is chosen from the group of: Ba, Sr, and Li.

### Claim 17 (depends on 14)

The magnetic element of claim 14, wherein the binary compound layer comprises MgX where X is chosen from the group of: Ba, Sr, and Li, each alloy layer is MgO, and each pure metal layer is Mg.

### Claim 18

A method comprising:
constructing a lower electrode portion of a magnetic stack with at least one ferromagnetic layer;
forming a multilayer barrier structure atop the lower electrode portion, the multilayer barrier structure having a binary compound layer disposed between first and second alloy layers, the binary compound comprising a metal element and a second element, at least one alloy layer comprising the metal element and a third element dissimilar from the second element; and
depositing a top electrode portion a magnet stack with at least one ferromagnetic layer atop the multilayer barrier structure.

### Claim 19 (depends on 18)

The method of claim 18, further comprising cooling the magnetic stack to a cryogenic temperature prior to the depositing step.

### Claim 20 (depends on 18)

The method of claim 18, further comprising heating the magnetic stack to an elevated temperature prior to the depositing step.
