# US 2014/0154488 A1 · Silicon titanium oxide coating, coated article including silicon titanium oxide coating, and method of making the same

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- Number: US 2014/0154488 A1
- Document ID: US20140154488A1
- Status: Published application
- Kind: A1
- Application number: 14/173,015
- Filed: 2014-02-05
- Published: 2014-06-05
- Earliest claimed: 2005-11-14
- Assignees: Guardian Industries Corp.
- Applicants: Guardian Industries Corp.
- Inventors: Yiwei LU
- Web page: https://patentgrep.com/patent/US20140154488A1

## CPC

- G02B 1/115: Multilayers
- C03C 17/3417: {all coatings being oxide coatings}
- C03C 17/3423: {at least one of the coatings comprising a suboxide}
- C03C 17/3435: {comprising a nitride, oxynitride, boronitride or carbonitride}
- C23C 14/08: Oxides (C23C14/10 takes precedence)
- C23C 14/3414: {Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy}
- C03C 2217/212: TiO2
- C03C 2217/213: SiO2
- C03C 2217/23: Mixtures
- C03C 2217/73: Anti-reflective coatings with specific characteristics
- C03C 2217/734: comprising an alternation of high and low refractive indexes
- C03C 2217/94: Transparent conductive oxide layers [TCO] being part of a multilayer coating
- C03C 2218/154: by sputtering
- C03C 2218/155: by reactive sputtering
- C03C 2218/156: by magnetron sputtering
- Y10T 428/24975: No layer or component greater than 5 mils thick
- G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- C03C: CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04)
- Y10T: TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION

## Abstract

Certain example embodiments relate to a layer of or including Ti1-xSixOy and/or a method of making the same. In certain example embodiments, the Ti1-xSixOy-based layer may be substoichiometric with respect to oxygen. In certain example embodiments of this invention, the layer may include Ti1-xSixQy where x is from about 0.05 to 0.95 (more preferably from about 0.1 to 0.9, and even more preferably from about 0.2 to 0.8, and possibly from about 0.5 to 0.8) and y is from about 0.2 to 2 (more preferably from about 1 to 2, and even more preferably from about 1.5 to 2, and possibly from about 1.9 to 2). The layer may have an index of refraction of from about 1.6 to 1.9. The layer may also be used with a transparent conductive oxide in a transparent conductive coating.

## Claims

### Claim at position 1

1-22. (canceled)

### Claim 23

A coated article comprising an antireflection coating, wherein the anti-reflection coating comprises:
a first layer having a medium index of refraction and comprising Ti1-xSixOy, where x is greater than or equal to 0.5, and having a thickness of from about 30 to 70 nm;
a second layer having a comparatively higher index of refraction and comprising an oxide of titanium, and having a thickness of from about 80 to 110 nm;
a third layer having an index of refraction lower than both the first and second layers, and comprising an oxide of silicon, having a thickness of from about 70 to 100 nm; and
wherein the medium index layer is formed by sputter deposition from a ceramic target comprising a target material comprising titanium, silicon and oxygen, and has an index of refraction of from about 1.6 to 1.9.

### Claim 24 (depends on 23)

The coated article of claim 23, wherein regarding said first layer having the medium index of refraction, x is less than 0.95 and y is from 0.2 to 2.

### Claim 25 (depends on 23)

The coated article of claim 23, wherein said second layer is located over and directly contacting the first layer.

### Claim 26 (depends on 25)

The coated article of claim 25, wherein the third layer is located over and directly contacting the second layer.