# US 2014/0154424 A1 · Roll-to-roll sputtering method

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- Number: US 2014/0154424 A1
- Document ID: US20140154424A1
- Status: Published application
- Kind: A1
- Application number: 14/093,777
- Filed: 2013-12-02
- Published: 2014-06-05
- Earliest claimed: 2012-12-03
- Assignees: Samsung Corning Precision Materials Co., Ltd.
- Applicants: Samsung Corning Precision Materials Co., Ltd.
- Inventors: Jung Hong Oh; Jin Soo An; Chang Moog Rim; Gi Mo Yang; Sang Yoon Oh
- Web page: https://patentgrep.com/patent/US20140154424A1

## CPC

- C23C 14/086: {of zinc, germanium, cadmium, indium, tin, thallium or bismuth}
- C23C 14/34: Sputtering
- C23C 14/541: {Heating or cooling of the substrates}
- C23C 14/562: {for coating elongated substrates}
- C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04)

## Abstract

A roll-to-roll sputtering method transports a flexible substrate wound on an unwinder roll to a depositing part, forms a deposited film on the flexible substrate, and winds the flexible substrate on a winder roll. The depositing part includes a first depositing part. The first depositing part includes a first sputtering part which deposits a first target material on one surface of the flexible substrate and a heater which is disposed at a side of the other surface of the flexible substrate to heat the flexible substrate.

## Claims

### Claim 1

A roll-to-roll sputtering method which transports a flexible substrate wound on an unwinder roll to a depositing part, forms a deposited film on the flexible substrate, and winds the flexible substrate on a winder roll, wherein the depositing part comprises a first depositing part, the first depositing part comprising:
a first sputtering part which deposits a first target material on one surface of the flexible substrate; and
a heater which is disposed at a side of the other surface of the flexible substrate to heat the flexible substrate.

### Claim 2 (depends on 1)

The roll-to-roll sputtering method of claim 1, wherein the depositing part further comprises a second depositing part, the second depositing part comprising:
a second sputtering part which deposits a second target material on the one surface of the flexible substrate; and
a cooling drum which contacts and cools down the flexible substrate.

### Claim 3 (depends on 2)

The roll-to-roll sputtering method of claim 2, wherein the cooling drum has a flow path therein, wherein cooling water flows along the flow path in order to maintain the flexible substrate at a predetermined temperature.

### Claim 4 (depends on 2)

The roll-to-roll sputtering method of claim 2, wherein the second sputtering part comprises a plurality of sputtering parts.

### Claim 5 (depends on 2)

The roll-to-roll sputtering method of claim 2, wherein the first target material and the second target material are a same material or different materials.

### Claim 6 (depends on 2)

The roll-to-roll sputtering method of claim 2, wherein the first target material comprises ITO, and the second target material comprises Nb2O5 or SiO2.

### Claim 7 (depends on 2)

The roll-to-roll sputtering method of claim 2, wherein the flexible substrate comprises an organic film, and only the second target material is deposited with the second depositing part on and the first depositing part off.

### Claim 8 (depends on 1)

The roll-to-roll sputtering method of claim 1, wherein the first depositing part comprises a heat insulation member which blocks transfer of heat generated by the heater to an outside of the first depositing part.

### Claim 9 (depends on 8)

The roll-to-roll sputtering method of claim 8, wherein the first depositing part further comprises cooling means for preventing heat generated by the heater from being transferred to an outside of the first deposition part.

### Claim 10 (depends on 1)

The roll-to-roll sputtering method of claim 1, wherein the flexible substrate comprises flexible glass.

### Claim 11 (depends on 1)

The roll-to-roll sputtering method of claim 1, wherein the heater crystallizes the first target material deposited on the one surface of the flexible substrate.

### Claim 12 (depends on 1)

The roll-to-roll sputtering method of claim 1, wherein the first sputtering part comprises a plurality of sputtering parts.