# US 2014/0154033 A1 · Dual arm vacuum robot > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2014/0154033 A1 - Document ID: US20140154033A1 - Status: Published application - Kind: A1 - Application number: 14/092,240 - Filed: 2013-11-27 - Published: 2014-06-05 - Earliest claimed: 2012-11-30 - Assignees: Lam Research Corporation - Applicants: Lam Research Corporation - Inventors: Richard Blank; Matt McLellan - Web page: https://patentgrep.com/patent/US20140154033A1 ## CPC - H10P 72/3302: {Mechanical parts of transfer devices} - B25J 9/042: {comprising an articulated arm} - B25J 9/043: {double selective compliance articulated robot arms [SCARA]} - B25J 11/0095: {Manipulators transporting wafers} - H10P 72/3306: {Horizontal transfer of a single workpiece} - Y10S 901/27: Arm part - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 - B25J: MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES ({manipulators specially adapted for use in surgery A61B34/70; manipulators used in cleaning hollow articles B08B9/04}; manipulators associated with rolling mills B21B39/20; manipulators associated with forging machines B21J13/10; {manipulators associated with picking-up and placing mechanisms B23P19/007}; means for holding wheels or parts thereof B60B30/00; {vehicles with ground-engaging propulsion means, e.g. walking members B62D57/02, B62D57/032; devices for picking-up and depositing articles or materials between conveyors B65G47/90, B65G47/91; manipulators with gripping or holding means for transferring packages B65H67/065}; cranes B66C; {manipulators used in the protection or supervision of pipe-line installations F17D5/00; walking equipment adapted for nuclear steam-generators F22B37/006}; manipulators specially adapted for, or associated with, nuclear reactors G21C; {apparatus used for handling wafers during manufacture or treatment of semiconductor H10P72/50}) - Y10S: TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS ## Abstract A dual arm robot for a substrate processing system includes a base and a first arm having extended and retracted positions. Each of the first and second arms includes a first arm portion having one end rotatably connected to the base, a second arm portion having one end rotatably connected to another end of the first arm portion, and an end effector having one end rotatably connected to another end of the second arm portion and another end configured to support first and second substrates, respectively. When the first and second arms are arranged in the retracted position, connections between the second arm portions and the end effectors are located over or under the second and first substrates, respectively, and the first substrate is not located over or under the second substrate. ## Claims ### Claim 1 A dual arm robot for a substrate processing system, comprising: a base; a first arm having extended and retracted positions and including: a first arm portion having one end rotatably connected to the base; a second arm portion having one end rotatably connected to another end of the first arm portion; and an end effector having one end rotatably connected to another end of the second arm portion and another end configured to support a first substrate; and a second arm having extended and retracted positions including: a first arm portion having one end rotatably connected to the base; a second arm portion having one end rotatably connected to another end of the first arm portion; and an end effector having one end rotatably connected to another end of the second arm portion and another end configured to support a second substrate, wherein when the first and second arms are arranged in the retracted position: a connection between the second arm portion of the first arm and the end effector of the first arm is located over the second substrate; a connection between the second arm portion of the second arm and the end effector of the second arm is located under the first substrate; and the first substrate is not located over the second substrate. ### Claim 2 (depends on 1) The dual arm robot of claim 1, wherein the first substrate does not pass over the second substrate as at least one of the first arm or the second arm moves between the retracted position and the extended position. ### Claim 3 (depends on 1) The dual arm robot of claim 1, wherein when the first arm portion of the first arm and the first arm portion of the second arm are in retracted position, (i) the first arm portion of the first arm and the first arm portion of the second arm are co-linear, and (ii) circumferential outer edges of the first substrate and the second substrate are located within a circle defined by radially outermost portions of the first arm portion of the first arm and the first arm portion of the second arm. ### Claim 4 (depends on 1) The dual arm robot of claim 1, further comprising a drive mechanism configured to couple rotation of the first arm portion of the first arm relative to the base in a first rotational direction to rotation of (i) the second arm portion of the first arm relative to the first arm portion of the first arm in a second rotational direction opposite to the first rotational direction and (ii) rotation of the end effector of the first arm relative to the second arm portion of the first arm in the first rotational direction. ### Claim 5 (depends on 4) The dual arm robot of claim 4, wherein the drive mechanism is further configured to couple rotation of the first arm portion of the second arm relative to the base in the second rotational direction to rotation of (i) the second arm portion of the second arm relative to the first arm portion of the second arm in the first rotational direction and (ii) rotation of the end effector of the second arm relative to the second arm portion of the second arm in the second rotational direction. ### Claim 6 (depends on 1) The dual arm robot of claim 1, wherein the drive mechanism includes: a first motor; a second motor; and a common motor, wherein rotation of the first motor extends and retracts the first and second arms relative to the base, rotation of the first motor and the second motor allows extension and retraction of the first arm or the second arm relative to the base, and rotation of the common motor rotates the first arm and the second arm relative to the base without extension or retraction. ### Claim 7 (depends on 6) The dual arm robot of claim 6, wherein the drive mechanism includes: one or more pulleys and one or more drive belts to: rotationally couple rotation of the first arm portion of the first arm, the second arm portion of the first arm and the end effector of the first arm; and rotationally couple rotation of the first arm portion of the second arm, the second arm portion of the second arm and the end effector of the second arm. ### Claim 8 (depends on 5) The dual arm robot of claim 5, wherein when the drive mechanism rotates the first arm portion of the first arm by a first angle relative to the base, the drive mechanism (i) rotates the second arm portion of the first arm by a second angle relative to the first arm portion of the first arm and (ii) rotates the end effector of the first arm by a third angle relative to the second arm portion of the first arm. ### Claim 9 (depends on 8) The dual arm robot of claim 8, wherein a magnitude of the first angle is greater than a magnitude of the second angle, and the magnitude of the second angle is greater than a magnitude of the third angle. ### Claim 10 (depends on 9) The dual arm robot of claim 9, wherein the magnitude of the second angle is one half of the magnitude of the first angle and the magnitude of the third angle is one half of the magnitude of the second angle. ### Claim 11 (depends on 1) The dual arm robot of claim 1, wherein the first arm extends in an opposite direction than the second arm. ### Claim 12 (depends on 5) The dual arm robot of claim 5, wherein when the drive mechanism rotates the first arm portion of the second arm by a first angle relative to the base, the drive mechanism (i) rotates the second arm portion of the second arm by a second angle relative to the first arm portion of the second arm and (ii) rotates the end effector of the second arm by a third angle relative to the second arm portion of the second arm. ### Claim 13 (depends on 12) The dual arm robot of claim 12, wherein a magnitude of the first angle is greater than a magnitude of the second angle, and the magnitude of the second angle is greater than a magnitude of the third angle. ### Claim 14 (depends on 13) The dual arm robot of claim 13, wherein the magnitude of the second angle is one half of the magnitude of the first angle and the magnitude of the third angle is one half of the magnitude of the second angle.